Fabrication of poly-Si films by continuous local thermal chemical vapor deposition on flexible quartz glass substrate

2008 ◽  
Vol 93 (24) ◽  
pp. 241503
Author(s):  
T. Nakamura ◽  
H. Kuraseko ◽  
K. Hanazawa ◽  
H. Koaizawa ◽  
Y. Uraoka ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Quartz Glass ◽  
Vapor Deposition ◽  
Glass Substrate ◽  
Chemical Vapor ◽  
Quartz Glass Substrate ◽  
Thermal Chemical Vapor Deposition ◽  
Si Films

The Growth of β-SiC on Si and Poly-Si on β-SiC by Rapid Thermal Chemical Vapor Deposition

1997 ◽  
Vol 470 ◽  
Author(s):  
C. W. Liu ◽  
J. C. Sturm
Keyword(s):  
Chemical Vapor Deposition ◽  
Heterojunction Bipolar Transistors ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Buffer Layers ◽  
Initial Growth ◽  
Initial Surface ◽  
Single Crystalline ◽  
Thermal Chemical Vapor Deposition ◽  
Si Films

ABSTRACTThe growth properties of β-SiC on (100) Si grown by rapid thermal chemical vapor deposition, using a single precursor (methylsilane) without an initial surface carbonization step, were investigated. An optimun growth temperature at 800°C was found to grow single crystalline SiC. The single crystalline SiC films were used to be the buffer layers for the growth of subsequent poly Si films. For the poly Si grown at low temperature (625°C), the (110) Si diffraction was found to be the dominant peak in the X-ray diffraction spectra at the initial growth stage, while the poly Si grown on oxide was dominated by (111) texture. A small average misfit (4 %) between (110) Si planes and (100) SiC planes was proposed to explain this effect. To apply the Si/SiC/Si multilayers, SiC/Si heterojunction bipolar transistors (HBT's) were fabricated and compared to Si bipolar junction transistors.

scholarly journals Gas Phase Chemistry of Trimethylboron in Thermal Chemical Vapor Deposition

2017 ◽  
Vol 121 (47) ◽  
pp. 26465-26471 ◽  
Author(s):  
Mewlude Imam ◽  
Laurent Souqui ◽  
Jan Herritsch ◽  
Andreas Stegmüller ◽  
Carina Höglund ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Thermal Chemical Vapor Deposition ◽  
Gas Phase Chemistry ◽  
Phase Chemistry
Sign in / Sign up

Export Citation Format

Share Document