Monte Carlo simulation study of scanning electron microscopy images of rough surfaces

Y. G. Li; S. F. Mao; H. M. Li; S. M. Xiao; Z. J. Ding

doi:10.1063/1.2977745

Monte Carlo simulation study of scanning electron microscopy images of rough surfaces

Journal of Applied Physics ◽

10.1063/1.2977745 ◽

2008 ◽

Vol 104 (6) ◽

pp. 064901 ◽

Cited By ~ 24

Author(s):

Y. G. Li ◽

S. F. Mao ◽

H. M. Li ◽

S. M. Xiao ◽

Z. J. Ding

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Simulation Study ◽

Rough Surfaces ◽

Monte Carlo Simulation Study ◽

Microscopy Images ◽

Scanning Electron

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A Monte Carlo simulation study on the image resolution in scanning electron microscopy

Surface and Interface Analysis ◽

10.1002/sia.3340 ◽

2010 ◽

Vol 42 (6-7) ◽

pp. 1096-1099 ◽

Cited By ~ 4

Author(s):

S. F. Mao ◽

Z. J. Ding

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Simulation Study ◽

Image Resolution ◽

Monte Carlo Simulation Study ◽

Scanning Electron

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Unstructured tetrahedric meshes for the description of complex three-dimensional sample geometries in Monte Carlo simulation of scanning electron microscopy images for metrology applications

Microelectronics Reliability ◽

10.1016/j.microrel.2013.07.131 ◽

2013 ◽

Vol 53 (9-11) ◽

pp. 1381-1386 ◽

Cited By ~ 4

Author(s):

Emre Ilgünsatiroglu ◽

Alexey Yu. Illarionov ◽

Mauro Ciappa

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Three Dimensional ◽

Microscopy Images ◽

Scanning Electron

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Application of Monte Carlo Simulation Method to the Nano-Scale Characterization by Scanning Electron Microscopy

Materials Science Forum - PRICM-5 ◽

10.4028/0-87849-960-1.4161 ◽

2005 ◽

pp. 4161-4164

Author(s):

Z.J. Ding ◽

H.M. Li ◽

X. Sun

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Simulation Method ◽

Monte Carlo Simulation Method ◽

Nano Scale ◽

Scale Characterization ◽

Scanning Electron

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Surface roughness of preparations for backscattered electron-scanning electron microscopy: The image differences and their monte carlo simulation

Scanning ◽

10.1002/sca.4950210601 ◽

2006 ◽

Vol 21 (6) ◽

pp. 361-367 ◽

Cited By ~ 7

Author(s):

P. G. T. Howell ◽

A. Boyde

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Surface Roughness ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Backscattered Electron ◽

Scanning Electron

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Dewetting transition of water confined between atomically rough surfaces: A lattice gas Monte Carlo simulation study

Chemical Physics Letters ◽

10.1016/j.cplett.2018.01.032 ◽

2018 ◽

Vol 694 ◽

pp. 29-34

Author(s):

Liyi Bai ◽

Jihye Jang ◽

Zhengqing Zhang ◽

Joonkyung Jang

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Simulation Study ◽

Lattice Gas ◽

Rough Surfaces ◽

Monte Carlo Simulation Study

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Monte Carlo simulation of scanning electron microscopy bright contrast images of suspended carbon nanofibers

Applied Physics Letters ◽

10.1063/1.2450655 ◽

2007 ◽

Vol 90 (8) ◽

pp. 083111 ◽

Cited By ~ 20

Author(s):

Makoto Suzuki ◽

Toshishige Yamada ◽

Cary Y. Yang

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Carbon Nanofibers ◽

Bright Contrast ◽

Scanning Electron

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The effect of gaseous and liquid water layers on the estimation of the composition of materials in High Pressure Scanning Electron Microscopy (HPSEM): A Monte Carlo Simulation

Electron Microscopy and Analysis 1997 ◽

10.1201/9781003063056-63 ◽

2022 ◽

pp. 245-248

Author(s):

H R Powell ◽

K J Hollis ◽

J S Shah

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Monte Carlo Simulation ◽

High Pressure ◽

Monte Carlo ◽

Liquid Water ◽

Water Layers ◽

Scanning Electron

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Synthesis of Scanning Electron Microscopy Images of Nanostructures by High-Performance Monte Carlo Modeling

Microscopy Methods in Nanomaterials Characterization ◽

10.1016/b978-0-323-46141-2.00002-x ◽

2017 ◽

pp. 31-83

Author(s):

Mauro Ciappa

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Monte Carlo ◽

High Performance ◽

Monte Carlo Modeling ◽

Microscopy Images ◽

Scanning Electron

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New integrated Monte Carlo code for the simulation of high-resolution scanning electron microscopy images for metrology in microlithography

10.1117/12.2048306 ◽

2014 ◽

Cited By ~ 3

Author(s):

Emre Ilgüsatiroglu ◽

Alexey Yu. Illarionov ◽

Mauro Ciappa ◽

Paul Pfäffli ◽

Lars Bomholt

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Monte Carlo ◽

High Resolution ◽

Monte Carlo Code ◽

Microscopy Images ◽

Scanning Electron

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A novel Monte Carlo simulation code for linewidth measurement in critical dimension scanning electron microscopy

10.1117/12.853804 ◽

2010 ◽

Cited By ~ 13

Author(s):

Alexander Koschik ◽

Mauro Ciappa ◽

Stephan Holzer ◽

Maurizio Dapor ◽

Wolfgang Fichtner

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Critical Dimension ◽

Simulation Code ◽

Linewidth Measurement ◽

Scanning Electron

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