A novel Monte Carlo simulation code for linewidth measurement in critical dimension scanning electron microscopy

2010 ◽  
Author(s):  
Alexander Koschik ◽  
Mauro Ciappa ◽  
Stephan Holzer ◽  
Maurizio Dapor ◽  
Wolfgang Fichtner
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Critical Dimension ◽  
Simulation Code ◽  
Linewidth Measurement ◽  
Scanning Electron

Bright Contrast Imaging of Carbon Nanofiber-Substrate Interface using Scanning Electron Microscopy

2006 ◽  
Vol 963 ◽  
Author(s):  
Makoto Suzuki ◽  
Yusuke Ominami ◽  
Quoc Ngo ◽  
Toshishige Yamada ◽  
Bill Roth ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Electron Beam ◽  
Carbon Nanofiber ◽  
Contrast Imaging ◽  
Bright Contrast ◽  
Gap Height ◽  
Scanning Electron

ABSTRACTScanning electron microscopy (SEM) for imaging the interface between carbon nanofibers (CNFs) and the underlying substrate is presented. By irradiating the electron beam perpendicular to the substrate, bright contrast is observed at the region where a small gap exists between the CNF and substrate. The energy-diameter diagram for the observation of the bright contrast is derived, which can be understood by using the theory of electron penetration into solid. Monte Carlo simulation is performed to reproduce the experimental observation based on our model, and the contrast sensitivity to the gap height is discussed.

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