A high-current microwave ion source with permanent magnet and its beam emittance measurement

2008 ◽  
Vol 79 (7) ◽  
pp. 073304 ◽  
Author(s):  
Zeen Yao ◽  
Xinjian Tan ◽  
Hongxin Du ◽  
Ben Luo ◽  
Zhanwen Liu
Keyword(s):  
Permanent Magnet ◽  
Ion Source ◽  
High Current ◽  
Beam Emittance ◽  
Microwave Ion Source ◽  
Emittance Measurement

Minipermanent magnet high-current microwave ion source

2006 ◽  
Vol 77 (3) ◽  
pp. 03A305 ◽  
Author(s):  
Zhizhong Song ◽  
Shixiang Peng ◽  
Jinxiang Yu ◽  
Jianchuan Ming ◽  
Zhongxi Yuan ◽  
...  
Keyword(s):  
Ion Source ◽  
High Current ◽  
Microwave Ion Source

scholarly journals Characteristics of a High Current Microwave Ion Source for Oxygen Ion Implanter.

Shinku ◽  
1999 ◽  
Vol 42 (7) ◽  
pp. 670-675 ◽  
Author(s):  
Takayoshi SEKI ◽  
Katsumi TOKIGUCHI
Keyword(s):  
Ion Source ◽  
High Current ◽  
Oxygen Ion ◽  
Microwave Ion Source

High‐current ion implanter using a microwave ion source

1983 ◽  
Vol 54 (6) ◽  
pp. 681-684 ◽  
Author(s):  
Noriyuki Sakudo ◽  
Katsumi Tokiguchi ◽  
Hidemi Koike ◽  
Ichiro Kanomata
Keyword(s):  
Ion Source ◽  
High Current ◽  
Microwave Ion Source

Microwave ion source with permanent magnet for 100 keV ion implantation

2006 ◽  
Vol 77 (3) ◽  
pp. 03A315
Author(s):  
Jianchuan Ming ◽  
Qiqian Guo ◽  
Jinhui Wang ◽  
Weijiang Zhao ◽  
Yulan Bai ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Permanent Magnet ◽  
Ion Source ◽  
Microwave Ion Source

scholarly journals Development of a new high-current triode extraction system for helicon ion source: design and simulation

2018 ◽  
Vol 36 (4) ◽  
pp. 477-486 ◽  
Author(s):  
M. Khoshhal ◽  
M. Habibi ◽  
Rod W. Boswell
Keyword(s):  
Ion Implantation ◽  
Ion Beam ◽  
Ion Source ◽  
High Current ◽  
Ion Temperature ◽  
Beam Emittance ◽  
Extraction Voltage ◽  
Parabolic Geometry ◽  
First Time ◽  
Plasma Electrode

AbstractThree triode extraction systems are simulated by IBSimu ion optical code for Amirkabir Helicon Ion Source (AHIS). The optimized pierce and suggested parabolic electrodes are introduced for the first time in this paper. The obtained N+ beam for parabolic geometry designed for ion implantation has 66 keV energy, and 10.4 mA current. Ion beam emittance and Twiss parameters of the emittance ellipse as the function of x term index are calculated for parabolic electrode equation. The simulated triode extraction systems have been evaluated by using of optimized parameters such as the extraction voltage, gap distance, plasma electrode (PE) aperture, and ion temperature. The extraction voltage, gap distance, PE aperture, and ion temperature have been changed in the range of 58–70 kV, 35–39 mm, 4–6 mm, and 0.5–4.4 eV in the simulations, respectively.

A compact microwave ion source with permanent magnet

1992 ◽  
Vol 63 (4) ◽  
pp. 2553-2555 ◽  
Author(s):  
Zhizhong Song ◽  
Jinxiang Yu ◽  
Renxing Li ◽  
Zhongxi Yuan
Keyword(s):  
Permanent Magnet ◽  
Ion Source ◽  
Microwave Ion Source

Off-resonance microwave ion source for high-current molecular ion-beams

2005 ◽  
Vol 237 (1-2) ◽  
pp. 428-432 ◽  
Author(s):  
N. Sakudo ◽  
N. Ikenaga ◽  
R. Nishimoto ◽  
Y. Tamashiro ◽  
T. Shinohara ◽  
...  
Keyword(s):  
Ion Beams ◽  
Ion Source ◽  
High Current ◽  
Molecular Ion ◽  
Microwave Ion Source ◽  
Resonance Microwave

Studies on the effect of the axial magnetic field on the x-ray bremsstrahlung in a 2.45 GHz permanent magnet microwave ion source

2014 ◽  
Vol 85 (2) ◽  
pp. 02C103 ◽  
Author(s):  
Narender Kumar ◽  
G. Rodrigues ◽  
P. S. Lakshmy ◽  
R. Baskaran ◽  
Y. Mathur ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Permanent Magnet ◽  
Axial Magnetic Field ◽  
Ion Source ◽  
X Ray ◽  
Microwave Ion Source
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