Microwave ion source with permanent magnet for 100 keV ion implantation

2006 ◽  
Vol 77 (3) ◽  
pp. 03A315
Author(s):  
Jianchuan Ming ◽  
Qiqian Guo ◽  
Jinhui Wang ◽  
Weijiang Zhao ◽  
Yulan Bai ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Permanent Magnet ◽  
Ion Source ◽  
Microwave Ion Source

A compact microwave ion source with permanent magnet

1992 ◽  
Vol 63 (4) ◽  
pp. 2553-2555 ◽  
Author(s):  
Zhizhong Song ◽  
Jinxiang Yu ◽  
Renxing Li ◽  
Zhongxi Yuan
Keyword(s):  
Permanent Magnet ◽  
Ion Source ◽  
Microwave Ion Source

Studies on the effect of the axial magnetic field on the x-ray bremsstrahlung in a 2.45 GHz permanent magnet microwave ion source

2014 ◽  
Vol 85 (2) ◽  
pp. 02C103 ◽  
Author(s):  
Narender Kumar ◽  
G. Rodrigues ◽  
P. S. Lakshmy ◽  
R. Baskaran ◽  
Y. Mathur ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Permanent Magnet ◽  
Axial Magnetic Field ◽  
Ion Source ◽  
X Ray ◽  
Microwave Ion Source

A high-current microwave ion source with permanent magnet and its beam emittance measurement

2008 ◽  
Vol 79 (7) ◽  
pp. 073304 ◽  
Author(s):  
Zeen Yao ◽  
Xinjian Tan ◽  
Hongxin Du ◽  
Ben Luo ◽  
Zhanwen Liu
Keyword(s):  
Permanent Magnet ◽  
Ion Source ◽  
High Current ◽  
Beam Emittance ◽  
Microwave Ion Source ◽  
Emittance Measurement

Axial magnetic field extraction‐type microwave ion source with a permanent magnet

1984 ◽  
Vol 55 (4) ◽  
pp. 449-456 ◽  
Author(s):  
Junzo Ishikawa ◽  
Yasuhiko Takeiri ◽  
Toshinori Takagi
Keyword(s):  
Magnetic Field ◽  
Permanent Magnet ◽  
Axial Magnetic Field ◽  
Ion Source ◽  
Microwave Ion Source

Non-mass analysed ion implantation using microwave ion source

Vacuum ◽  
1986 ◽  
Vol 36 (1-3) ◽  
pp. 11-14 ◽  
Author(s):  
K Tokiguchi ◽  
H Itoh ◽  
N Sakudo ◽  
H Koike ◽  
T Saitoh
Keyword(s):  
Ion Implantation ◽  
Ion Source ◽  
Microwave Ion Source

Microwave Ion Source with a Permanent Magnet Solenoid

2011 ◽  
Vol 59 (2(2)) ◽  
pp. 586-589 ◽  
Author(s):  
Yong-Sub Cho ◽  
Dae-Il Kim ◽  
Hyeok-Jung Kwon ◽  
Kyung-Tae Seol ◽  
Han-Sung Kim
Keyword(s):  
Permanent Magnet ◽  
Ion Source ◽  
Microwave Ion Source
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