High‐current ion implanter using a microwave ion source

1983 ◽  
Vol 54 (6) ◽  
pp. 681-684 ◽  
Author(s):  
Noriyuki Sakudo ◽  
Katsumi Tokiguchi ◽  
Hidemi Koike ◽  
Ichiro Kanomata
Keyword(s):  
Ion Source ◽  
High Current ◽  
Microwave Ion Source

Minipermanent magnet high-current microwave ion source

2006 ◽  
Vol 77 (3) ◽  
pp. 03A305 ◽  
Author(s):  
Zhizhong Song ◽  
Shixiang Peng ◽  
Jinxiang Yu ◽  
Jianchuan Ming ◽  
Zhongxi Yuan ◽  
...  
Keyword(s):  
Ion Source ◽  
High Current ◽  
Microwave Ion Source

scholarly journals Characteristics of a High Current Microwave Ion Source for Oxygen Ion Implanter.

Shinku ◽  
1999 ◽  
Vol 42 (7) ◽  
pp. 670-675 ◽  
Author(s):  
Takayoshi SEKI ◽  
Katsumi TOKIGUCHI
Keyword(s):  
Ion Source ◽  
High Current ◽  
Oxygen Ion ◽  
Microwave Ion Source

Off-resonance microwave ion source for high-current molecular ion-beams

2005 ◽  
Vol 237 (1-2) ◽  
pp. 428-432 ◽  
Author(s):  
N. Sakudo ◽  
N. Ikenaga ◽  
R. Nishimoto ◽  
Y. Tamashiro ◽  
T. Shinohara ◽  
...  
Keyword(s):  
Ion Beams ◽  
Ion Source ◽  
High Current ◽  
Molecular Ion ◽  
Microwave Ion Source ◽  
Resonance Microwave

A high-current microwave ion source with permanent magnet and its beam emittance measurement

2008 ◽  
Vol 79 (7) ◽  
pp. 073304 ◽  
Author(s):  
Zeen Yao ◽  
Xinjian Tan ◽  
Hongxin Du ◽  
Ben Luo ◽  
Zhanwen Liu
Keyword(s):  
Permanent Magnet ◽  
Ion Source ◽  
High Current ◽  
Beam Emittance ◽  
Microwave Ion Source ◽  
Emittance Measurement

Optimization of Compact Microwave Ion Source for Generation of High Current and Low Energy Ion Beam

2011 ◽  
Author(s):  
Shuhei Taguchi ◽  
Yasuhito Gotoh ◽  
Hiroshi Tsuji ◽  
Shigeki Sakai ◽  
Junzo Ishikawa ◽  
...  
Keyword(s):  
Ion Beam ◽  
Ion Source ◽  
Low Energy ◽  
High Current ◽  
Microwave Ion Source

Development of a high-current microwave ion source for proton linac application systems

2004 ◽  
Vol 75 (5) ◽  
pp. 1894-1896 ◽  
Author(s):  
M. Tanaka ◽  
S. Hara ◽  
T. Hae ◽  
T. Iga ◽  
K. Saitou ◽  
...  
Keyword(s):  
Ion Source ◽  
High Current ◽  
Application Systems ◽  
Microwave Ion Source ◽  
Proton Linac

High-current microwave ion source for wide-energy-range O+ ion implantation

2000 ◽  
Vol 71 (2) ◽  
pp. 952-954 ◽  
Author(s):  
K. Tokiguchi ◽  
T. Seki ◽  
J. Ito ◽  
T. Sato ◽  
K. Mera
Keyword(s):  
Ion Implantation ◽  
Energy Range ◽  
Ion Source ◽  
Wide Energy Range ◽  
High Current ◽  
Microwave Ion Source ◽  
Wide Energy
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