Development of an all-permanent-magnet microwave ion source equipped with multicusp magnetic fields for high current proton beam production

2008 ◽  
Vol 79 (2) ◽  
pp. 02B317
Author(s):  
M. Tanaka ◽  
S. Hara ◽  
T. Seki ◽  
T. Iga
Keyword(s):  
Magnetic Fields ◽  
Permanent Magnet ◽  
Proton Beam ◽  
Ion Source ◽  
High Current ◽  
Beam Production ◽  
Microwave Ion Source

A high-current microwave ion source with permanent magnet and its beam emittance measurement

2008 ◽  
Vol 79 (7) ◽  
pp. 073304 ◽  
Author(s):  
Zeen Yao ◽  
Xinjian Tan ◽  
Hongxin Du ◽  
Ben Luo ◽  
Zhanwen Liu
Keyword(s):  
Permanent Magnet ◽  
Ion Source ◽  
High Current ◽  
Beam Emittance ◽  
Microwave Ion Source ◽  
Emittance Measurement

Minipermanent magnet high-current microwave ion source

2006 ◽  
Vol 77 (3) ◽  
pp. 03A305 ◽  
Author(s):  
Zhizhong Song ◽  
Shixiang Peng ◽  
Jinxiang Yu ◽  
Jianchuan Ming ◽  
Zhongxi Yuan ◽  
...  
Keyword(s):  
Ion Source ◽  
High Current ◽  
Microwave Ion Source

scholarly journals Characteristics of a High Current Microwave Ion Source for Oxygen Ion Implanter.

Shinku ◽  
1999 ◽  
Vol 42 (7) ◽  
pp. 670-675 ◽  
Author(s):  
Takayoshi SEKI ◽  
Katsumi TOKIGUCHI
Keyword(s):  
Ion Source ◽  
High Current ◽  
Oxygen Ion ◽  
Microwave Ion Source

High‐current ion implanter using a microwave ion source

1983 ◽  
Vol 54 (6) ◽  
pp. 681-684 ◽  
Author(s):  
Noriyuki Sakudo ◽  
Katsumi Tokiguchi ◽  
Hidemi Koike ◽  
Ichiro Kanomata
Keyword(s):  
Ion Source ◽  
High Current ◽  
Microwave Ion Source

Microwave ion source with permanent magnet for 100 keV ion implantation

2006 ◽  
Vol 77 (3) ◽  
pp. 03A315
Author(s):  
Jianchuan Ming ◽  
Qiqian Guo ◽  
Jinhui Wang ◽  
Weijiang Zhao ◽  
Yulan Bai ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Permanent Magnet ◽  
Ion Source ◽  
Microwave Ion Source

A compact microwave ion source with permanent magnet

1992 ◽  
Vol 63 (4) ◽  
pp. 2553-2555 ◽  
Author(s):  
Zhizhong Song ◽  
Jinxiang Yu ◽  
Renxing Li ◽  
Zhongxi Yuan
Keyword(s):  
Permanent Magnet ◽  
Ion Source ◽  
Microwave Ion Source
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