Effect of photon irradiation on structure of yttria-doped zirconia thin films grown on semiconductor substrates

2007 ◽  
Vol 91 (25) ◽  
pp. 253104 ◽  
Author(s):  
Masaru Tsuchiya ◽  
Shriram Ramanathan
Keyword(s):  
Thin Films ◽  
Photon Irradiation ◽  
Semiconductor Substrates

Effect of photon irradiation on structural, dielectric, and insulating properties of Ba0.60Sr0.40TiO3 thin films

2008 ◽  
Vol 92 (21) ◽  
pp. 212906 ◽  
Author(s):  
Adrian Podpirka ◽  
M. W. Cole ◽  
Shriram Ramanathan
Keyword(s):  
Thin Films ◽  
Photon Irradiation ◽  
Insulating Properties

Improvement in the adhesion of thin films to semiconductors and oxides using electron and photon irradiation

1985 ◽  
Vol 22-23 ◽  
pp. 1034-1041 ◽  
Author(s):  
J. Gazecki ◽  
G.A. Sai-Halasz ◽  
R.G. Elliman ◽  
A. Kellock ◽  
G.L. Nyberg ◽  
...  
Keyword(s):  
Thin Films ◽  
Photon Irradiation ◽  
Electron And Photon

Structural characterization of pulsed laser-deposited AlN thin films on semiconductor substrates

1997 ◽  
Vol 308-309 ◽  
pp. 406-409 ◽  
Author(s):  
Ashok Kumar ◽  
H.L Chan ◽  
J.J Weimer ◽  
L Sanderson
Keyword(s):  
Thin Films ◽  
Structural Characterization ◽  
Pulsed Laser ◽  
Semiconductor Substrates

Effects of surface nature of different semiconductor substrates on the plasma enhanced atomic layer deposition growth of Al2O3gate dielectric thin films

2015 ◽  
Vol 12 (7) ◽  
pp. 980-984 ◽  
Author(s):  
Emanuela Schilirò ◽  
Giuseppe Greco ◽  
Patrick Fiorenza ◽  
Cristina Tudisco ◽  
Guglielmo Guido Condorelli ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Dielectric Thin Films ◽  
Layer Deposition ◽  
Semiconductor Substrates ◽  
Surface Nature

Formation of Y-Ba-Cu-O Superconducting Thin Films on Semiconductor Substrates

1988 ◽  
Author(s):  
Michihiro MIYAUCHI ◽  
Koichi MIZUNO ◽  
Takeshi KAMADA ◽  
Kentaro SETSUNE ◽  
Takashi HIRAO ◽  
...  
Keyword(s):  
Thin Films ◽  
Superconducting Thin Films ◽  
Semiconductor Substrates
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