Effect of grain size and pores on the dielectric constant of nanocrystalline diamond films

2007 ◽  
Vol 90 (13) ◽  
pp. 133118 ◽  
Author(s):  
Z. L. Wang ◽  
J. J. Li ◽  
Z. H. Sun ◽  
Y. L. Li ◽  
Q. Luo ◽  
...  
MRS Bulletin ◽  
1998 ◽  
Vol 23 (9) ◽  
pp. 36-41 ◽  
Author(s):  
P. Keblinski ◽  
D. Wolf ◽  
F. Cleri ◽  
S.R. Phillpot ◽  
H. Gleiter

The low-pressure synthesis of rather pure nanocrystalline diamond films from fullerene precursors suggests that for a small enough grain size the diamond structure may be energetically preferred over graphite. Because of the small grain size of typically about 15 nm in these films, a significant fraction of the carbon atoms is situated in the grain boundaries (GBs). The surprisingly high wear resistance of these films even after the substrate is removed and their high corrosion resistance suggest that the grains are strongly bonded. Grain-boundary carbon is also believed to be responsible for the absorption and scattering of light in these films, for their electrical conductivity, and for their electron-emission properties. In spite of all these indications of a critical role played by GB carbon in achieving the remarkable properties of nanocrystalline diamond films, to date the atomic structures of the GBs are essentially not known.It is well-known that the electronic and optical properties of polycrystalline silicon films are significantly affected by the presence of GBs. For example GBs can provide active sites for the recombination of electron-hole pairs in photovoltaic applications. Also, in electronic devices such as thin-film transistors, GBs are known to play an important role. Because of silicon's strong energetic preference for sp3 hybridization over other electronic configurations, the structural disorder in silicon GBs is accommodated by a distortion of the tetrahedral nearestneighbor bonds and in the extreme by the creation of dangling bonds—that is, of three-coordinated Si atoms each having one unsaturated, bound electron in an otherwise more or less tetrahedrally coordinated environment.


2001 ◽  
Vol 222 (3) ◽  
pp. 591-594 ◽  
Author(s):  
N Jiang ◽  
K Sugimoto ◽  
K Eguchi ◽  
T Inaoka ◽  
Y Shintani ◽  
...  

2012 ◽  
Vol 1395 ◽  
Author(s):  
Fernando A. Souza ◽  
Adriana F. Azevedo ◽  
Maurício R. Baldan ◽  
Neidenêi G. Ferreira

ABSTRACTBoron-doped nanocrystalline diamond (BDND) films were grown on silicon substrates by hot filament chemical vapor deposition in Ar/H2/CH4 gas mixtures. The boron source was obtained from an additional H2 line passing through a bubbler containing B2O3 dissolved in methanol with different B/C ratios. The transition from ultrananocrystalline to nanocrystalline diamond films is clearly shown by the addition of boron dopant to the growth gas mixture. The morphology and structure of these films have markedly different properties. The top view and the cross section of the films were characterized by scanning electron microscopy showing the transition from ultrananocrystalline growth (renucleation process) to a columnar structure of NCD films. Finally, the grain size was obtained from X-ray diffraction patterns of the films. The diamond average grain size increased from 10 to 35 nm for films with 2000 and 30,000 ppm B/C, respectively.


2008 ◽  
Vol 205 (9) ◽  
pp. 2146-2153 ◽  
Author(s):  
Milan Kopecek ◽  
Lucie Bacakova ◽  
Jiri Vacik ◽  
Frantisek Fendrych ◽  
Vladimir Vorlicek ◽  
...  

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