scholarly journals Bulk and surface thermal stability of ultra nanocrystalline diamond films with 10–30 nm grain size prepared by chemical vapor deposition

2010 ◽  
Vol 107 (9) ◽  
pp. 093521 ◽  
Author(s):  
Sh. Michaelson ◽  
A. Stacey ◽  
J. Orwa ◽  
A. Cimmino ◽  
S. Prawer ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Grain Size ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Nanocrystalline Diamond ◽  
Nanocrystalline Diamond Films ◽  
Thermal Stability Of

Thermal Stability of Nanocrystalline Diamond Films Grown by Microwave Plasma Chemical Vapor Deposition

2002 ◽  
Vol 750 ◽  
Author(s):  
Mevlut Bulut ◽  
Shane A. Catledge ◽  
Yogesh K. Vohra ◽  
Renato P. Camata
Keyword(s):  
Thermal Stability ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Nanocrystalline Diamond ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Nanocrystalline Diamond Films ◽  
Thermal Stability Of

ABSTRACTIn this work, the open-air thermal stability of nanocrystalline diamond films grown on mirror-polished titanium alloy substrates by the Microwave Plasma Chemical Vapor Deposition (MPCVD) technique was studied. The results of this investigation show that nanocrystalline diamond films are highly stable in air up to 600°C with no significant change in mechanical properties. Samples annealed between 600°C and 650°C, however, exhibit values of hardness lower by as much as 40% compared to as-grown samples. Above 650°C serious delamination effects were observed in the coatings.

Study of Undoped Nanocrystalline Diamond Films Grown by Microwave Plasma-Assisted Chemical Vapor Deposition

2021 ◽  
Vol 55 (1) ◽  
pp. 66-75
Author(s):  
A. L. Vikharev ◽  
S. A. Bogdanov ◽  
N. M. Ovechkin ◽  
O. A. Ivanov ◽  
D. B. Radishev ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Nanocrystalline Diamond ◽  
Nanocrystalline Diamond Films
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