Laser-based measurement of elastic and mechanical properties of layered polycrystalline silicon structures with projection masks

2006 ◽  
Vol 88 (10) ◽  
pp. 101915 ◽  
Author(s):  
A. Bennis ◽  
A. M. Lomonosov ◽  
Z. H. Shen ◽  
P. Hess
Keyword(s):  
Mechanical Properties ◽  
Polycrystalline Silicon ◽  
Silicon Structures

Mechanical Properties of Transparent Polycrystalline Silicon Nitride

2006 ◽  
Vol 317-318 ◽  
pp. 305-308 ◽  
Author(s):  
Rak Joo Sung ◽  
Takafumi Kusunose ◽  
Tadachika Nakayama ◽  
Yoon Ho Kim ◽  
Tohru Sekino ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Fracture Toughness ◽  
Silicon Nitride ◽  
Young’S Modulus ◽  
Fracture Strength ◽  
Polycrystalline Silicon ◽  
Volume Fraction ◽  
Young's Modulus ◽  
Β Phase ◽  
Α Phase

A novel transparent polycrystalline silicon nitride was fabricated by hot-press sintering with MgO and AlN as additives. The mixed powder with 3 wt.% MgO and 9 wt.% AlN was sintered at 1900oC for 1 hour under 30 MPa pressure in a nitrogen gas atmosphere. Transparent polycrystalline silicon nitride was successfully fabricated. The mechanical properties such as density, hardness, young’s modulus, fracture strength and fracture toughness were evaluated. The effect of α/β phase on the mechanical properties of transparent polycrystalline silicon nitride was investigated. The properties were changed depending on the amount of α/β phase. The hardness and Young's modulus increased with increasing the volume fraction of α-phase fraction as a reflection of the higher hardness of α-phase Si3N4. The fracture toughness and fracture strength decreased with decreasing the volume fraction of β-phase Si3N4.

Oxidation of tantalum disilicide/polycrystalline silicon structures in dry O2

1982 ◽  
Vol 53 (7) ◽  
pp. 5342-5344 ◽  
Author(s):  
Reda R. Razouk ◽  
Michael E. Thomas ◽  
Sylvia L. Pressacco
Keyword(s):  
Polycrystalline Silicon ◽  
Silicon Structures

Stress measurement by microRaman spectroscopy of polycrystalline silicon structures

1995 ◽  
Vol 5 (2) ◽  
pp. 132-135 ◽  
Author(s):  
M S Benrakkad ◽  
M A Benitez ◽  
J Esteve ◽  
J M Lopez-Villegas ◽  
J Samitier ◽  
...  
Keyword(s):  
Polycrystalline Silicon ◽  
Stress Measurement ◽  
Silicon Structures ◽  
Microraman Spectroscopy
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