Vapor deposition of perfluoropolyether lubricant on fluorinated diamondlike carbon surface

2006 ◽  
Vol 99 (8) ◽  
pp. 08N108 ◽  
Author(s):  
Masahiro Kawaguchi ◽  
Junho Choi ◽  
Takahisa Kato
Keyword(s):  
Vapor Deposition ◽  
Carbon Surface ◽  
Diamondlike Carbon ◽  
Perfluoropolyether Lubricant

Using Molecular-Beam Mass Spectrometry to Study the Pecvd of Diamondlike Carbon Films

1993 ◽  
Vol 334 ◽  
Author(s):  
I.B. Graff ◽  
R.A. Pugliese ◽  
P.R. Westmoreland
Keyword(s):  
Mass Spectrometry ◽  
Vapor Deposition ◽  
Molecular Beam ◽  
Film Growth ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Total Flow ◽  
Measured Concentration ◽  
Molecular Beam Mass Spectrometry ◽  
Diamondlike Carbon

AbstractMolecular-beam mass spectrometry has been used to study plasma-enhanced chemical vapor deposition (PECVD) of diamondlike carbon films. A threshold-ionization technique was used to identify and quantify species in the plasma. Mole fractions of H, H2, CH4, C2H2, C2H6 and Ar were measured in an 83.3% CH4/Ar mixture at a pressure of 0.1 torr and a total flow of 30 sccm. Comparisons were made between mole fractions measured at plasma powers of 25W and 50W. These results were compared to measured concentration profiles and to film growth rates.

scholarly journals One-step chemical vapor deposition synthesis and supercapacitor performance of nitrogen-doped porous carbon–carbon nanotube hybrids

2017 ◽  
Vol 8 ◽  
pp. 2669-2679 ◽  
Author(s):  
Egor V Lobiak ◽  
Lyubov G Bulusheva ◽  
Ekaterina O Fedorovskaya ◽  
Yury V Shubin ◽  
Pavel E Plyusnin ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Hybrid Materials ◽  
Vapor Deposition ◽  
Porous Carbon ◽  
Photoelectron Spectroscopy ◽  
Electrochemical Impedance ◽  
Chemical Vapor ◽  
Carbon Surface ◽  
Simultaneous Formation ◽  
Nitrogen Doped

Novel nitrogen-doped carbon hybrid materials consisting of multiwalled nanotubes and porous graphitic layers have been produced by chemical vapor deposition over magnesium-oxide-supported metal catalysts. CN x nanotubes were grown on Co/Mo, Ni/Mo, or Fe/Mo alloy nanoparticles, and MgO grains served as a template for the porous carbon. The simultaneous formation of morphologically different carbon structures was due to the slow activation of catalysts for the nanotube growth in a carbon-containing gas environment. An analysis of the obtained products by means of transmission electron microscopy, thermogravimetry and X-ray photoelectron spectroscopy methods revealed that the catalyst's composition influences the nanotube/porous carbon ratio and concentration of incorporated nitrogen. The hybrid materials were tested as electrodes in a 1M H2SO4 electrolyte and the best performance was found for a nitrogen-enriched material produced using the Fe/Mo catalyst. From the electrochemical impedance spectroscopy data, it was concluded that the nitrogen doping reduces the resistance at the carbon surface/electrolyte interface and the nanotubes permeating the porous carbon provide fast charge transport in the cell.

Correlation of molecular hydrogen dissociation and the film quality of diamondlike carbon in plasma enhanced chemical vapor deposition

1995 ◽  
Vol 66 (23) ◽  
pp. 3152-3154 ◽  
Author(s):  
R. C. Cheshire ◽  
W. G. Graham ◽  
T. Morrow ◽  
V. Kornas ◽  
H. F. Döbele ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Molecular Hydrogen ◽  
Chemical Vapor ◽  
Hydrogen Dissociation ◽  
Diamondlike Carbon

Deposition of perfluoropolyether lubricant films on Si-incorporated diamondlike carbon surfaces

2006 ◽  
Vol 99 (8) ◽  
pp. 08N109 ◽  
Author(s):  
Junho Choi ◽  
Masahiro Kawaguchi ◽  
Takahisa Kato ◽  
Masami Ikeyama
Keyword(s):  
Diamondlike Carbon ◽  
Lubricant Films ◽  
Perfluoropolyether Lubricant ◽  
Carbon Surfaces

Investigation of a New Cyclotriphosphazene-Terminated Perfluoropolyether Lubricant. Properties and Interactions with a Carbon Surface

2003 ◽  
Vol 15 (12) ◽  
pp. 2362-2375 ◽  
Author(s):  
R. J. Waltman ◽  
D. J. Pocker ◽  
H. Deng ◽  
N. Kobayashi ◽  
Y. Fujii ◽  
...  
Keyword(s):  
Carbon Surface ◽  
Perfluoropolyether Lubricant
Sign in / Sign up

Export Citation Format

Share Document