Electron energy distribution function and plasma parameters across magnetic filters

A. Aanesland; J. Bredin; P. Chabert; V. Godyak

doi:10.1063/1.3680088

Electron energy distribution function and plasma parameters across magnetic filters

Applied Physics Letters ◽

10.1063/1.3680088 ◽

2012 ◽

Vol 100 (4) ◽

pp. 044102 ◽

Cited By ~ 56

Author(s):

A. Aanesland ◽

J. Bredin ◽

P. Chabert ◽

V. Godyak

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Plasma Parameters

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Time evolution of electron energy distribution function and plasma parameters in pulsed and unbalanced magnetron argon discharge

Journal of Applied Physics ◽

10.1063/1.1990264 ◽

2005 ◽

Vol 98 (4) ◽

pp. 043301 ◽

Cited By ~ 5

Author(s):

Sang-Hun Seo ◽

Jung-Hwan In ◽

Hong-Young Chang ◽

Jeon-Geon Han

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Time Evolution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Plasma Parameters ◽

Unbalanced Magnetron ◽

Argon Discharge

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Temporal evolution of electron energy distribution function and plasma parameters in the afterglow of drifting magnetron plasma

Plasma Sources Science and Technology ◽

10.1088/0963-0252/14/3/021 ◽

2005 ◽

Vol 14 (3) ◽

pp. 576-580 ◽

Cited By ~ 9

Author(s):

Sang-Hun Seo ◽

Jung-Hwan In ◽

Hong-Young Chang

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Temporal Evolution ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Plasma Parameters

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Electron energy distribution function measurements and plasma parameters in inductively coupled argon plasma

Plasma Sources Science and Technology ◽

10.1088/0963-0252/11/4/320 ◽

2002 ◽

Vol 11 (4) ◽

pp. 525-543 ◽

Cited By ~ 236

Author(s):

V A Godyak ◽

R B Piejak ◽

B M Alexandrovich

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Plasma Parameters ◽

Inductively Coupled

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Apparatus for the electron energy distribution function measurement in the afterglow discharge

Czechoslovak Journal of Physics ◽

10.1007/bf01589560 ◽

1977 ◽

Vol 27 (9) ◽

pp. 1027-1033 ◽

Cited By ~ 1

Author(s):

M. Tichý

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Function Measurement

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Electron energy distribution function in the collisional-radiative model of an argon plasma

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/18/3/005 ◽

1985 ◽

Vol 18 (3) ◽

pp. 347-358 ◽

Cited By ~ 8

Author(s):

J Vlcek ◽

V Pelikan

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Collisional Radiative Model ◽

Radiative Model

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Electron Energy Distribution Function Measured by Electrostatic Probes at Divertor Plasma in JFT-2M Tokamak

Japanese Journal of Applied Physics ◽

10.1143/jjap.42.657 ◽

2003 ◽

Vol 42 (Part 1, No. 2A) ◽

pp. 657-662 ◽

Cited By ~ 5

Author(s):

Kazuya Uehara ◽

Akira Tsushima ◽

Hiroshi Amemiya ◽

Hisato Kawasima ◽

Katsumichi Hoshino

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Measurements on the electron-energy distribution function in a low-pressure cesium discharge

Physica ◽

10.1016/0031-8914(72)90050-x ◽

1972 ◽

Vol 57 (4) ◽

pp. 624-627 ◽

Cited By ~ 1

Author(s):

A.J. Postma ◽

K. Wiesemann

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Effect of the electron energy distribution function in plasma on the Bohm criterion and on the drop voltage through the sheath: Case of microwave expanding plasma

Journal of Applied Physics ◽

10.1063/1.3211910 ◽

2009 ◽

Vol 106 (5) ◽

pp. 053307 ◽

Cited By ~ 2

Author(s):

J. L. Jauberteau ◽

I. Jauberteau

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Bohm Criterion

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Electron energy distribution function measurements in a magnetic multipole plasma

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/20/7/004 ◽

1987 ◽

Vol 20 (7) ◽

pp. 838-843 ◽

Cited By ~ 49

Author(s):

M B Hopkins ◽

W G Graham

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution

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The hot electron energy distribution function in ZnS:Cu:Cl:Er thin films

phys stat sol (a) ◽

10.1002/pssa.2210830135 ◽

1984 ◽

Vol 83 (1) ◽

pp. 315-322 ◽

Cited By ~ 9

Author(s):

A. Krier ◽

F. J. Bryant

Keyword(s):

Thin Films ◽

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Hot Electron ◽

Electron Energy Distribution

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