Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process

2005 ◽  
Vol 97 (12) ◽  
pp. 121301 ◽  
Author(s):  
Riikka L. Puurunen
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Chemistry ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals ALD coating of centrifugally spun polymeric fibers and postannealing: case study for nanotubular TiO2 photocatalyst

2021 ◽  
Author(s):  
Martina Rihova ◽  
Oksana Yurkevich ◽  
Martin Motola ◽  
Ludek Hromadko ◽  
Zdeněk Spotz ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Vinyl Pyrrolidone ◽  
Tio2 Photocatalyst ◽  
Polymeric Fibers ◽  
Layer Deposition ◽  
Centrifugal Spinning ◽  
Poly Vinyl Pyrrolidone

This work describes the synthesis of highly photocatalytically active TiO2 tubes (TiTBs) by combining centrifugal spinning and atomic layer deposition (ALD). Poly(vinyl pyrrolidone) (PVP) fibers were first produced by centrifugal...

scholarly journals Role of oligomer structures in the surface chemistry of amidinate metal complexes used for atomic layer deposition of thin films

2019 ◽  
Vol 35 (7) ◽  
pp. 720-731 ◽  
Author(s):  
Jonathan Guerrero-Sánchez ◽  
Bo Chen ◽  
Noboru Takeuchi ◽  
Francisco Zaera
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Surface Chemistry ◽  
Metal Complexes ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Image Position

Abstract

scholarly journals Surface chemistry of LiNi0.5Mn1.5O4 particles coated by Al2O3 using atomic layer deposition for lithium-ion batteries

2015 ◽  
Vol 274 ◽  
pp. 1254-1262 ◽  
Author(s):  
Jin Wook Kim ◽  
Dong Hyeon Kim ◽  
Dae Yang Oh ◽  
Hyeyoun Lee ◽  
Ji Hyun Kim ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Chemistry ◽  
Lithium Ion Batteries ◽  
Lithium Ion ◽  
Atomic Layer ◽  
Layer Deposition

An infrared study of the surface chemistry of titanium nitride atomic layer deposition on silica from TiCl4 and NH3

2006 ◽  
Vol 514 (1-2) ◽  
pp. 97-102 ◽  
Author(s):  
Mark Q. Snyder ◽  
Benjamin A. McCool ◽  
Joseph DiCarlo ◽  
Carl P. Tripp ◽  
William J. DeSisto
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Chemistry ◽  
Titanium Nitride ◽  
Atomic Layer ◽  
Infrared Study ◽  
Layer Deposition
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