Electrical characterization of strained Si∕SiGe wafers using transient capacitance measurements
Keyword(s):
2006 ◽
Vol 376-377
◽
pp. 411-415
◽
2004 ◽
Vol 72
(1-4)
◽
pp. 253-256
◽
2006 ◽
Vol 126
(11)
◽
pp. 1332-1339
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