Calculation of the electrode shape for suppression of the standing wave effect in large area rectangular capacitively coupled reactors

2005 ◽  
Vol 97 (6) ◽  
pp. 063304 ◽  
Author(s):  
L. Sansonnens
Keyword(s):  
Standing Wave ◽  
Large Area ◽  
Wave Effect ◽  
Capacitively Coupled ◽  
Electrode Shape ◽  
Coupled Reactors

Broadband microwave absorption and standing wave effect in helium capacitively coupled plasma

2017 ◽  
Vol 24 (8) ◽  
pp. 083511 ◽  
Author(s):  
Yachun Zhang ◽  
Xiang He ◽  
Jianping Chen ◽  
Li Chen ◽  
Hongchao Zhang ◽  
...  
Keyword(s):  
Microwave Absorption ◽  
Standing Wave ◽  
Wave Effect ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Strong and large area field enhancement outside a microcavity due to propagating surface plasmons and standing wave effect

2016 ◽  
Vol 18 (10) ◽  
pp. 105004
Author(s):  
Meng Wang ◽  
Bin Wang ◽  
Xin Sun ◽  
Haoyu Li ◽  
Feng Wang ◽  
...  
Keyword(s):  
Surface Plasmons ◽  
Standing Wave ◽  
Field Enhancement ◽  
Large Area ◽  
Wave Effect

Effect of Segmenting Powered Electrode on Plasma Uniformity in Large-Area Capacitively Coupled Plasma Discharge

2011 ◽  
Vol 39 (11) ◽  
pp. 2526-2527 ◽  
Author(s):  
Zhigang Chen ◽  
Jason Kenney ◽  
Shahid Rauf ◽  
Ken Collins ◽  
Tom Tanaka ◽  
...  
Keyword(s):  
Plasma Discharge ◽  
Large Area ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
Sign in / Sign up

Export Citation Format

Share Document