Application of the shaped electrode technique to a large area rectangular capacitively coupled plasma reactor to suppress standing wave nonuniformity

2006 ◽  
Vol 24 (4) ◽  
pp. 1425-1430 ◽  
Author(s):  
L. Sansonnens ◽  
H. Schmidt ◽  
A. A. Howling ◽  
Ch. Hollenstein ◽  
Ch. Ellert ◽  
...  
Keyword(s):  
Standing Wave ◽  
Plasma Reactor ◽  
Large Area ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma ◽  
Electrode Technique

Effect of Segmenting Powered Electrode on Plasma Uniformity in Large-Area Capacitively Coupled Plasma Discharge

2011 ◽  
Vol 39 (11) ◽  
pp. 2526-2527 ◽  
Author(s):  
Zhigang Chen ◽  
Jason Kenney ◽  
Shahid Rauf ◽  
Ken Collins ◽  
Tom Tanaka ◽  
...  
Keyword(s):  
Plasma Discharge ◽  
Large Area ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

scholarly journals A technique for evaluating the RF voltage across the electrodes of a capacitively-coupled plasma reactor

2006 ◽  
Vol 36 (2) ◽  
pp. 177-182 ◽  
Author(s):  
V. Lisovskiy ◽  
J.-P. Booth ◽  
K. Landry ◽  
D. Douai ◽  
V. Cassagne ◽  
...  
Keyword(s):  
Plasma Reactor ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
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