The effect of hydrogen etching on 6H-SiC studied by temperature-dependent current-voltage and atomic force microscopy
Keyword(s):
2000 ◽
Vol 18
(2)
◽
pp. 632
◽
Keyword(s):
1999 ◽
Vol 197
(1-2)
◽
pp. 37-47
◽
1998 ◽
Vol 69
(9)
◽
pp. 3245-3250
◽
Keyword(s):
2009 ◽
Vol 113
(11)
◽
pp. 4502-4506
◽
Keyword(s):
Keyword(s):
2021 ◽
Vol 125
(37)
◽
pp. 20439-20449
Keyword(s):
Keyword(s):
Keyword(s):