Effect of hydrogen etching on 6H SiC surface morphology studied by reflection high-energy positron diffraction and atomic force microscopy
Keyword(s):
1999 ◽
Vol 200
(3-4)
◽
pp. 348-352
◽
2002 ◽
Vol 106
(26)
◽
pp. 6696-6705
◽
2019 ◽
Vol 19
(3)
◽
pp. 1242-1247
◽
Keyword(s):
Keyword(s):
1993 ◽
Vol 133
(1-2)
◽
pp. 185-188
◽
Keyword(s):