Magnetic fields and uniformity of radio frequency power deposition in low-frequency inductively coupled plasmas with crossed internal oscillating currents

E. L. Tsakadze; K. Ostrikov; Z. L. Tsakadze; S. V. Vladimirov; S. Xu

doi:10.1063/1.1768176

Magnetic fields and uniformity of radio frequency power deposition in low-frequency inductively coupled plasmas with crossed internal oscillating currents

Physics of Plasmas ◽

10.1063/1.1768176 ◽

2004 ◽

Vol 11 (8) ◽

pp. 3915-3924 ◽

Cited By ~ 3

Author(s):

E. L. Tsakadze ◽

K. Ostrikov ◽

Z. L. Tsakadze ◽

S. V. Vladimirov ◽

S. Xu

Keyword(s):

Magnetic Fields ◽

Radio Frequency ◽

Low Frequency ◽

Radio Frequency Power ◽

Inductively Coupled Plasmas ◽

Power Deposition ◽

Inductively Coupled ◽

Coupled Plasmas ◽

Frequency Power

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Effect of low frequency power on the electron energy distribution function in argon inductively coupled plasmas

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.5133978 ◽

2020 ◽

Vol 38 (2) ◽

pp. 022801

Author(s):

Ju-Ho Kim ◽

Deuk-Chul Kwon ◽

Chin-Wook Chung

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Frequency ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Low Frequency Power ◽

Coupled Plasmas ◽

Frequency Power

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Magnetic Field Generation in an Inductively Coupled Radio-Frequency Power Transmission System

37th IEEE Power Electronics Specialists Conference ◽

10.1109/pesc.2006.1711922 ◽

2006 ◽

Cited By ~ 8

Author(s):

K. O'Brien ◽

R. Teichmann ◽

H. Gueldner

Keyword(s):

Magnetic Field ◽

Radio Frequency ◽

Power Transmission ◽

Transmission System ◽

Radio Frequency Power ◽

Magnetic Field Generation ◽

Inductively Coupled ◽

Field Generation ◽

Power Transmission System ◽

Frequency Power

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From amorphous to microcrystalline: Phase transition in rapid synthesis of hydrogenated silicon thin film in low frequency inductively coupled plasmas

Journal of Applied Physics ◽

10.1063/1.3514006 ◽

2010 ◽

Vol 108 (11) ◽

pp. 113520 ◽

Cited By ~ 21

Author(s):

S. Q. Xiao ◽

S. Xu ◽

D. Y. Wei ◽

S. Y. Huang ◽

H. P. Zhou ◽

...

Keyword(s):

Thin Film ◽

Phase Transition ◽

Low Frequency ◽

Inductively Coupled Plasmas ◽

Silicon Thin Film ◽

Rapid Synthesis ◽

Hydrogenated Silicon ◽

Inductively Coupled ◽

Coupled Plasmas

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Comparison of electron cyclotron resonance and radio-frequency inductively coupled plasmas of Ar and N2: Neutral kinetic energies and source gas cracking

Journal of Applied Physics ◽

10.1063/1.366916 ◽

1998 ◽

Vol 83 (4) ◽

pp. 1917-1923 ◽

Cited By ~ 6

Author(s):

N. Materer ◽

Rory S. Goodman ◽

Stephen R. Leone

Keyword(s):

Radio Frequency ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Diagnostics and Simulation of Low-Frequency Inductively Coupled Plasmas

10.1063/1.1593868 ◽

2003 ◽

Author(s):

K. N. Ostrikov

Keyword(s):

Low Frequency ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Effects of radio-frequency driving power, gas pressure, and nitrogen seeding on the transition dynamics in argon inductively coupled plasmas

Journal of Applied Physics ◽

10.1063/1.1790066 ◽

2004 ◽

Vol 96 (9) ◽

pp. 4771-4776 ◽

Cited By ~ 10

Author(s):

M. Abdur Razzak ◽

Shuichi Takamura ◽

Yoshihiko Uesugi

Keyword(s):

Radio Frequency ◽

Gas Pressure ◽

Inductively Coupled Plasmas ◽

Transition Dynamics ◽

Inductively Coupled ◽

Coupled Plasmas

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Radio frequency power deposition in a high-density helicon discharge with helical antenna coupling

Physics of Plasmas ◽

10.1063/1.1288399 ◽

2000 ◽

Vol 7 (10) ◽

pp. 4308 ◽

Cited By ~ 39

Author(s):

Th. Enk ◽

M. Krämer

Keyword(s):

Radio Frequency ◽

High Density ◽

Radio Frequency Power ◽

Helical Antenna ◽

Power Deposition ◽

Antenna Coupling ◽

Frequency Power

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Electronic dynamic behavior in inductively coupled plasmas with radio-frequency bias

Chinese Physics B ◽

10.1088/1674-1056/23/11/115202 ◽

2014 ◽

Vol 23 (11) ◽

pp. 115202 ◽

Cited By ~ 1

Author(s):

Fei Gao ◽

Yu-Ru Zhang ◽

Shu-Xia Zhao ◽

Xue-Chun Li ◽

You-Nian Wang

Keyword(s):

Radio Frequency ◽

Dynamic Behavior ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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On Judgement of Electron Escape for Evaluation of the Magnetic Confinement Effect in Simulations of Inductively Coupled Plasmas under Confronting Divergent Magnetic Fields

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms.137.363 ◽

2017 ◽

Vol 137 (6) ◽

pp. 363-364 ◽

Cited By ~ 1

Author(s):

Tappei Yamamoto ◽

Hirotake Sugawara

Keyword(s):

Magnetic Fields ◽

Magnetic Confinement ◽

Confinement Effect ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Electron Escape ◽

Coupled Plasmas

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Modeling Injection of Dense Liquid Sprays in Radio Frequency Inductively Coupled Plasmas

Plasma Chemistry and Plasma Processing ◽

10.1007/s11090-004-3027-9 ◽

2005 ◽

Vol 25 (3) ◽

pp. 193-214 ◽

Cited By ~ 8

Author(s):

Yanguang Shan ◽

Javad Mostaghimi

Keyword(s):

Radio Frequency ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Liquid Sprays ◽

Coupled Plasmas ◽

Dense Liquid

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