scholarly journals Effects of radio-frequency driving power, gas pressure, and nitrogen seeding on the transition dynamics in argon inductively coupled plasmas

2004 ◽  
Vol 96 (9) ◽  
pp. 4771-4776 ◽  
Author(s):  
M. Abdur Razzak ◽  
Shuichi Takamura ◽  
Yoshihiko Uesugi
Keyword(s):  
Radio Frequency ◽  
Gas Pressure ◽  
Inductively Coupled Plasmas ◽  
Transition Dynamics ◽  
Inductively Coupled ◽  
Coupled Plasmas

Electronic dynamic behavior in inductively coupled plasmas with radio-frequency bias

2014 ◽  
Vol 23 (11) ◽  
pp. 115202 ◽  
Author(s):  
Fei Gao ◽  
Yu-Ru Zhang ◽  
Shu-Xia Zhao ◽  
Xue-Chun Li ◽  
You-Nian Wang
Keyword(s):  
Radio Frequency ◽  
Dynamic Behavior ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas

scholarly journals Discharge physics and atomic layer etching in Ar/C4F6 inductively coupled plasmas with a radio frequency bias

2021 ◽  
Vol 28 (6) ◽  
pp. 063504
Author(s):  
Min Young Yoon ◽  
H. J. Yeom ◽  
Jung Hyung Kim ◽  
Won Chegal ◽  
Yong Jai Cho ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Atomic Layer ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas ◽  
Atomic Layer Etching

scholarly journals The influence of gas pressure on E↔H mode transition in argon inductively coupled plasmas

AIP Advances ◽  
2018 ◽  
Vol 8 (3) ◽  
pp. 035121 ◽  
Author(s):  
Xiao Zhang ◽  
Zhong-kai Zhang ◽  
Jin-xiang Cao ◽  
Yu Liu ◽  
Peng-cheng Yu
Keyword(s):  
Gas Pressure ◽  
Mode Transition ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas
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