High-performance polycrystalline silicon thin-film transistor with multiple nanowire channels and lightly doped drain structure

2004 ◽  
Vol 84 (19) ◽  
pp. 3822-3824 ◽  
Author(s):  
Yung-Chun Wu ◽  
Ting-Chang Chang ◽  
Chun-Yen Chang ◽  
Chi-Shen Chen ◽  
Chun-Hao Tu ◽  
...  
Keyword(s):  
Thin Film ◽  
Polycrystalline Silicon ◽  
High Performance ◽  
Thin Film Transistor ◽  
Silicon Thin Film ◽  
Lightly Doped Drain

A High-Performance Polycrystalline Silicon Thin-Film Transistor Using Metal-Induced Crystallization with Ni Solution

1998 ◽  
Vol 37 (Part 1, No. 12B) ◽  
pp. 7193-7197 ◽  
Author(s):  
Soo Young Yoon ◽  
Sung Ki Kim ◽  
Jae Young Oh ◽  
YoungJin Choi ◽  
Woo Sung Shon ◽  
...  
Keyword(s):  
Thin Film ◽  
Polycrystalline Silicon ◽  
High Performance ◽  
Thin Film Transistor ◽  
Silicon Thin Film ◽  
Metal Induced Crystallization ◽  
Induced Crystallization

Novel Fabrication of Lightly Doped-Drain for Suppressing the Leakage Current in Polycrystalline Silicon Thin-Film Transistor

2017 ◽  
Vol 17 (5) ◽  
pp. 3465-3468
Author(s):  
Hyung Yoon Kim ◽  
Ki Hwan Seok ◽  
Zohreh Kiaee ◽  
Hee Jae Chae ◽  
Sol Kyu Lee ◽  
...  
Keyword(s):  
Thin Film ◽  
Leakage Current ◽  
Polycrystalline Silicon ◽  
Thin Film Transistor ◽  
Silicon Thin Film ◽  
Lightly Doped Drain
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