A high-performance polycrystalline silicon thin film transistor with a silicon nitride gate insulator

1998 ◽  
Vol 45 (12) ◽  
pp. 2548-2551 ◽  
Author(s):  
K.H. Lee ◽  
J.K. Park ◽  
Jin Jang
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Polycrystalline Silicon ◽  
High Performance ◽  
Thin Film Transistor ◽  
Gate Insulator ◽  
Silicon Thin Film

Low temperature polycrystalline silicon thin film transistor with silicon nitride ion stopper

1996 ◽  
Vol 17 (6) ◽  
pp. 258-260 ◽  
Author(s):  
Kyung Ha Lee ◽  
Young Min Jhon ◽  
Hyuk Jin Cha ◽  
Jin Jang
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Low Temperature ◽  
Polycrystalline Silicon ◽  
Thin Film Transistor ◽  
Silicon Thin Film

A High-Performance Polycrystalline Silicon Thin-Film Transistor Using Metal-Induced Crystallization with Ni Solution

1998 ◽  
Vol 37 (Part 1, No. 12B) ◽  
pp. 7193-7197 ◽  
Author(s):  
Soo Young Yoon ◽  
Sung Ki Kim ◽  
Jae Young Oh ◽  
YoungJin Choi ◽  
Woo Sung Shon ◽  
...  
Keyword(s):  
Thin Film ◽  
Polycrystalline Silicon ◽  
High Performance ◽  
Thin Film Transistor ◽  
Silicon Thin Film ◽  
Metal Induced Crystallization ◽  
Induced Crystallization
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