Stoichiometry of thin silicon oxide layers on silicon

1974 ◽  
Vol 24 (3) ◽  
pp. 105-107 ◽  
Author(s):  
T. W. Sigmon ◽  
W. K. Chu ◽  
E. Lugujjo ◽  
J. W. Mayer
Keyword(s):  
Silicon Oxide ◽  
Oxide Layers ◽  
Thin Silicon

scholarly journals Experimental studies of thorium ion implantation from pulse laser plasma into thin silicon oxide layers

2018 ◽  
Vol 15 (5) ◽  
pp. 056101 ◽  
Author(s):  
P V Borisyuk ◽  
E V Chubunova ◽  
Yu Yu Lebedinskii ◽  
E V Tkalya ◽  
O S Vasilyev ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Pulse Laser ◽  
Laser Plasma ◽  
Silicon Oxide ◽  
Experimental Studies ◽  
Oxide Layers ◽  
Thin Silicon

Interpretation of XPS core level shifts and structure of thin silicon oxide layers

1985 ◽  
Vol 152-153 ◽  
pp. A162
Author(s):  
J. Finster ◽  
D. Schulze ◽  
F. Bechstedt ◽  
A. Meisel
Keyword(s):  
Silicon Oxide ◽  
Core Level ◽  
Oxide Layers ◽  
Level Shifts ◽  
Thin Silicon

Local Order Around Er3 Ions in thin Silicon Oxide Layers Grown in Si by MBE

2005 ◽  
pp. 384
Author(s):  
F. d'Acapito ◽  
S. Mobilio ◽  
A. Terrasi ◽  
S. Scalese ◽  
G. Franz ◽  
...  
Keyword(s):  
Silicon Oxide ◽  
Local Order ◽  
Oxide Layers ◽  
Thin Silicon

Interpretation of XPS core level shifts and structure of thin silicon oxide layers

1985 ◽  
Vol 152-153 ◽  
pp. 1063-1070 ◽  
Author(s):  
J. Finster ◽  
D. Schulze ◽  
F. Bechstedt ◽  
A. Meisel
Keyword(s):  
Silicon Oxide ◽  
Core Level ◽  
Oxide Layers ◽  
Level Shifts ◽  
Thin Silicon

High resolution Fowler‐Nordheim field emission maps of thin silicon oxide layers

1996 ◽  
Vol 68 (1) ◽  
pp. 93-95 ◽  
Author(s):  
Todd G. Ruskell ◽  
Richard K. Workman ◽  
Dong Chen ◽  
Dror Sarid ◽  
Sarah Dahl ◽  
...  
Keyword(s):  
High Resolution ◽  
Field Emission ◽  
Silicon Oxide ◽  
Oxide Layers ◽  
Thin Silicon

scholarly journals In situ transmission electron microscopy of resistive switching in thin silicon oxide layers

2016 ◽  
Vol 1 (1) ◽  
pp. 27-33 ◽  
Author(s):  
Martial Duchamp ◽  
Vadim Migunov ◽  
Amir H. Tavabi ◽  
Adnan Mehonic ◽  
Mark Buckwell ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Resistive Switching ◽  
Silicon Oxide ◽  
Oxide Layers ◽  
Transmission Electron ◽  
Thin Silicon

Mechanism of low temperature nitridation of silicon oxide layers by nitrogen plasma generated by low energy electron impact

1999 ◽  
Vol 85 (5) ◽  
pp. 2921-2928 ◽  
Author(s):  
Toshiko Mizokuro ◽  
Kenji Yoneda ◽  
Yoshihiro Todokoro ◽  
Hikaru Kobayashi
Keyword(s):  
Low Temperature ◽  
Electron Impact ◽  
Silicon Oxide ◽  
Nitrogen Plasma ◽  
Low Energy ◽  
Energy Electron ◽  
Oxide Layers ◽  
Low Energy Electron
Sign in / Sign up

Export Citation Format

Share Document