Hybrid electro-optic polymer/sol–gel waveguide modulator fabricated by all-wet etching process

2003 ◽  
Vol 83 (23) ◽  
pp. 4692-4694 ◽  
Author(s):  
Y. Enami ◽  
G. Meredith ◽  
N. Peyghambarian ◽  
A. K.-Y. Jen
Keyword(s):  
Sol Gel ◽  
Wet Etching ◽  
Etching Process ◽  
Electro Optic ◽  
Waveguide Modulator

FABRICATION OF SU-8 BASED ELECTRO-OPTIC SWITCH USING ALL-WET ETCHING TECHNIQUE

2013 ◽  
Vol 27 (04) ◽  
pp. 1350024 ◽  
Author(s):  
XIBIN WANG ◽  
JIAN SUN ◽  
LIN JIN ◽  
JIE MENG ◽  
YUNFEI YAN ◽  
...  
Keyword(s):  
Coplanar Waveguide ◽  
Waveguide Structure ◽  
Wet Etching ◽  
Etching Process ◽  
Characteristic Parameters ◽  
Etching Technique ◽  
Rib Waveguide ◽  
Processing Cost ◽  
Electro Optic ◽  
Disperse Red 1

Polymeric Disperse Red 1 (DR1)/SU-8 electro-optic (EO) switch incorporating inverted-rib waveguide structure is designed and fabricated by all-wet etching process. The guest-host EO material DR1/SU-8 has been successfully synthetized and its optical properties are characterized in detail. The DR1/SU-8 material presents a low processing cost, an excellent photostability and a large EO coefficient of 15.4 pm/V. The characteristic parameters of both the inverted-rib waveguide and the coplanar waveguide electrodes are carefully designed and simulated. By all-wet etching process, the optimized Mach–Zehnder interferometer switch is successfully fabricated with a lower fiber-to-fiber insertion loss of 9.6 dB. The switch rise time and fall time are 322 ns and 294 ns, respectively.

Photosensitive terpolymer for all-wet-etching process: Material characterization and device fabrication

2010 ◽  
Vol 518 (8) ◽  
pp. 2147-2151
Author(s):  
Abderrafia Moujoud ◽  
Sungho Kang ◽  
Hyun Jae Kim ◽  
Mark Andrews
Keyword(s):  
Material Characterization ◽  
Device Fabrication ◽  
Wet Etching ◽  
Etching Process ◽  
Process Material

scholarly journals Formation of PZT Thick Film Single Elements Using EHDA Deposition

2009 ◽  
Vol 628-629 ◽  
pp. 405-410 ◽  
Author(s):  
Da Zhi Wang ◽  
R.A. Dorey
Keyword(s):  
Thick Film ◽  
Relative Permittivity ◽  
Ultrasonic Transducer ◽  
Sol Gel ◽  
Etching Process ◽  
Single Element ◽  
Electrohydrodynamic Atomization ◽  
Fringe Effect ◽  
Pzt Thick Film

In this paper, electrohydrodynamic atomization combined with a polymeric micromoulding technique was used to form PZT single element devices using a PZT sol-gel slurry without an etching process. The PZT single element device was initially designed to work as a piezoelectric ultrasonic transducer consisting of a circular or a square of various sizes, which was produced and used to evaluate the process. The resulting PZT device had a homogenous microstructure. It was observed that the relative permittivity of the circular and square single element devices was especially high at small size due to the fringe effect. The results show that the radius and width of the PZT single circular and square element devices with a thickness of 15µm should be bigger than 400µm in order to reduce the fringe effect.

Integrated (Pb,La)(Zr,Ti)O3 Heterostructure Waveguide Devices Fabricated by Solid-Phase Epitaxy

1999 ◽  
Vol 597 ◽  
Author(s):  
K. Nashimoto ◽  
S. Nakamura ◽  
H. Moriyama ◽  
K. Haga ◽  
M. Watanabe ◽  
...  
Keyword(s):  
Low Voltage ◽  
Solid Phase ◽  
Wet Etching ◽  
Propagation Loss ◽  
Beam Deflection ◽  
Solid Phase Epitaxy ◽  
Te Mode ◽  
Tm Mode ◽  
Electro Optic ◽  
Channel Waveguides

AbstractHeterostructures of a Pb(Zr,Ti)O3 (PZT) waveguide/(Pb,La)(Zr,Ti)O3 (PLZT) system buffer layer were grown on a Nb-doped SrTiO3 (Nb:ST) substrate by solid-phase epitaxy. The propagation loss in the PLZT heterostructure waveguides was on the order of I dB/cm. An electro-optic beam deflection device with an ITO prism electrode on the surface of the PLZT heterostructure waveguide presented efficient deflection of the coupled laser beam by applying a voltage between the electrode and the substrate. A beam deflection greater than 10 mrad at 5 V and frequency response as fast as 13 MHz were observed. An apparent electro-optic coefficient as large as 39 pmJV was estimated from the deflection characteristics for the TE mode and TM mode suggesting the polarization independent nature of the PZT waveguide. For integrating the electrooptic PLZT heterostructure waveguides, channel waveguides were fabricated in the PZT waveguides using a simple wet-etching process. Based on a low-voltage drive structure, lowloss waveguide process, and fine patterning process, a fabricated digital matrix switch showed a – 10 dB cross-talk at a voltage as low as 7.5 V.

Sign in / Sign up

Export Citation Format

Share Document