Optical thin film deposition with O2 cluster ion beam assisted deposition

2003 ◽  
Author(s):  
Noriaki Toyoda
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Optical Thin Film ◽  
Ion Beam Assisted Deposition ◽  
Cluster Ion

Optical thin film formation by gas-cluster ion beam assisted deposition

1999 ◽  
Author(s):  
H. Katsumata ◽  
J. Matsuo ◽  
T. Nishihara ◽  
T. Tachibana ◽  
K. Yamada ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Ion Beam ◽  
Optical Thin Film ◽  
Ion Beam Assisted Deposition ◽  
Cluster Ion ◽  
Thin Film Formation ◽  
Gas Cluster Ion Beam

Ion beam pretreatment of polymeric substrates for ITO thin film deposition

2008 ◽  
Vol 10 (7) ◽  
pp. 941-949 ◽  
Author(s):  
Jun-Sik Cho ◽  
Younggun Han ◽  
Jerome J. Cuomo
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Polymeric Substrates

Thin-film deposition of (Ba/sub x/Sr/sub 1-x/)TiO/sub 3/ by pulsed ion beam evaporation

2000 ◽  
Vol 28 (5) ◽  
pp. 1545-1548 ◽  
Author(s):  
T. Sonegawa ◽  
K. Ohtomo ◽  
Weihua Jiang ◽  
K. Yatsui
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Thin Film Deposition ◽  
Film Deposition

Controlled thin-film deposition of α or β Ga2O3 by ion-beam sputtering

2020 ◽  
Vol 38 (6) ◽  
pp. 063412
Author(s):  
Martin Becker ◽  
Sebastian L. Benz ◽  
Limei Chen ◽  
Angelika Polity ◽  
Peter J. Klar ◽  
...  
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Ion Beam Sputtering ◽  
Beam Sputtering

Oxygen ion beam assisted thin film deposition

1990 ◽  
Vol 41 (3) ◽  
pp. 259-267 ◽  
Author(s):  
Reese Puckett ◽  
Lawrence Stelmack ◽  
Stephen Michel ◽  
Michael J. O'Connell ◽  
Paul Natishan
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Oxygen Ion

A simple optical thin film deposition monitor using LED’s and fiber optics

1982 ◽  
Vol 20 (1) ◽  
pp. 16-20 ◽  
Author(s):  
M. T. Gale ◽  
H. W. Lehmann ◽  
E. Heeb ◽  
K. Frick
Keyword(s):  
Thin Film ◽  
Fiber Optics ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Optical Thin Film

Pulsed Ion-Beam Evaporation for Thin-Film Deposition

2001 ◽  
Vol 40 (Part 1, No. 2B) ◽  
pp. 1026-1029 ◽  
Author(s):  
Weihua Jiang ◽  
Koji Ide ◽  
Shinji Kitayama ◽  
Tsuneo Suzuki ◽  
Kiyoshi Yatsui
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Thin Film Deposition ◽  
Film Deposition
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