Finding interstitial oxygen in an Si substrate during low-temperature plasma oxidation

2003 ◽  
Vol 82 (16) ◽  
pp. 2682-2684 ◽  
Author(s):  
Bo Hyun Kim ◽  
Jin Hyung Ahn ◽  
Byung Tae Ahn
Keyword(s):  
Low Temperature ◽  
Interstitial Oxygen ◽  
Plasma Oxidation ◽  
Low Temperature Plasma ◽  
Si Substrate ◽  
Temperature Plasma

scholarly journals LOW TEMPERATURE PLASMA OXIDATION TREATMENT OF SEVERAL ORGANIC PIGMENTS

1986 ◽  
Vol 15 (5) ◽  
pp. 675-678 ◽  
Author(s):  
Tatuhiko Ihara ◽  
Seisirô Itô ◽  
Mitsuo Kiboku
Keyword(s):  
Low Temperature ◽  
Plasma Oxidation ◽  
Low Temperature Plasma ◽  
Temperature Plasma ◽  
Oxidation Treatment ◽  
Organic Pigments

scholarly journals Low temperature plasma enhanced deposition of GaP films on Si substrate

2018 ◽  
Vol 36 (2) ◽  
pp. 021302 ◽  
Author(s):  
Alexander S. Gudovskikh ◽  
Ivan A. Morozov ◽  
Alexander V. Uvarov ◽  
Dmitriy A. Kudryashov ◽  
Ekaterina V. Nikitina ◽  
...  
Keyword(s):  
Low Temperature ◽  
Low Temperature Plasma ◽  
Si Substrate ◽  
Temperature Plasma

Low-temperature plasma oxidation of activated carbons

Carbon ◽  
2002 ◽  
Vol 40 (11) ◽  
pp. 2028-2030 ◽  
Author(s):  
L.I Schukin ◽  
M.V Kornievich ◽  
R.S Vartapetjan ◽  
S.I Beznisko
Keyword(s):  
Low Temperature ◽  
Activated Carbons ◽  
Plasma Oxidation ◽  
Low Temperature Plasma ◽  
Temperature Plasma

Microwave plasma stream transport system for low temperature plasma oxidation

1984 ◽  
Vol 2 (2) ◽  
pp. 496-499 ◽  
Author(s):  
Kiyoshi Miyake ◽  
Shin’ichiro Kimura ◽  
Terunori Warabisako ◽  
Hideo Sunami ◽  
Takashi Tokuyama
Keyword(s):  
Low Temperature ◽  
Transport System ◽  
Microwave Plasma ◽  
Plasma Stream ◽  
Plasma Oxidation ◽  
Low Temperature Plasma ◽  
Temperature Plasma ◽  
Stream Transport

(Invited) Scaling Requires Continuous Innovation in Thermal Processing: Low-Temperature Plasma Oxidation

2012 ◽  
Vol 45 (6) ◽  
pp. 151-161 ◽  
Author(s):  
W. Lerch ◽  
W. Kegel ◽  
J. Niess ◽  
A. Gschwandtner ◽  
J. Gelpey ◽  
...  
Keyword(s):  
Low Temperature ◽  
Thermal Processing ◽  
Plasma Oxidation ◽  
Low Temperature Plasma ◽  
Temperature Plasma ◽  
Continuous Innovation
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