Bragg diffraction, synchrotron x-ray reflectance, and x-ray photoelectron spectroscopy studies of low temperature plasma oxidation of native SiO[sub 2] on silicon on insulator
2012 ◽
Vol 557-559
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pp. 1668-1671
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2019 ◽
Vol 14
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pp. 155892501985402
2014 ◽
Vol 1048
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pp. 440-443
Keyword(s):
1996 ◽
Vol 92
(18)
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pp. 3425
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Keyword(s):
2011 ◽
Vol 175-176
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pp. 312-317
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