Control and analysis of ion species in N2 inductively coupled plasma with inert gas mixing
2001 ◽
Vol 136
(1-3)
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pp. 106-110
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2003 ◽
Vol 20
(9)
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pp. 1527-1529
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1993 ◽
Vol 283
(1)
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pp. 261-271
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2004 ◽
Vol 32
(3)
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pp. 1344-1351
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Keyword(s):
2015 ◽
Vol 30
(8)
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pp. 1689-1705
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2010 ◽
Vol 43
(10)
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pp. 105202
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2005 ◽
Vol 48
(1)
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pp. 61-70
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1997 ◽
Vol 45
(1)
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pp. 77-89
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