Plasma parameters analysis of various mixed gas inductively coupled plasmas

2002 ◽  
Vol 9 (6) ◽  
pp. 2831-2838 ◽  
Author(s):  
K. H. Bai ◽  
S. J. You ◽  
H. Y. Chang ◽  
H. S. Uhm
Keyword(s):  
Inductively Coupled Plasmas ◽  
Mixed Gas ◽  
Plasma Parameters ◽  
Inductively Coupled ◽  
Parameters Analysis ◽  
Coupled Plasmas

A Model-Based Analysis of Plasma Parameters and Composition in HBr/X (X=Ar, He, N[sub 2]) Inductively Coupled Plasmas

2010 ◽  
Vol 157 (5) ◽  
pp. H574 ◽  
Author(s):  
Kwang-Ho Kwon ◽  
Alexander Efremov ◽  
Moonkeun Kim ◽  
Nam Ki Min ◽  
Jaehwa Jeong ◽  
...  
Keyword(s):  
Inductively Coupled Plasmas ◽  
Plasma Parameters ◽  
Inductively Coupled ◽  
Model Based ◽  
Coupled Plasmas ◽  
Model Based Analysis

Fundamental studies of mixed-gas inductively coupled plasmas

1994 ◽  
Vol 49 (12-14) ◽  
pp. 1259-1282 ◽  
Author(s):  
Norman N. Sesi ◽  
Amelia Mackenzie ◽  
Kathryn E. Shanks ◽  
Pengyuan Yang ◽  
Gary M. Hieftje
Keyword(s):  
Inductively Coupled Plasmas ◽  
Mixed Gas ◽  
Inductively Coupled ◽  
Coupled Plasmas
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