Measurement of the total energy losses per electron-ion lost in various mixed gas inductively coupled plasmas

2010 ◽  
Vol 17 (4) ◽  
pp. 043508 ◽  
Keyword(s):  
Total Energy ◽  
Energy Losses ◽  
Inductively Coupled Plasmas ◽  
Mixed Gas ◽  
Inductively Coupled ◽  
Coupled Plasmas

Fundamental studies of mixed-gas inductively coupled plasmas

1994 ◽  
Vol 49 (12-14) ◽  
pp. 1259-1282 ◽  
Author(s):  
Norman N. Sesi ◽  
Amelia Mackenzie ◽  
Kathryn E. Shanks ◽  
Pengyuan Yang ◽  
Gary M. Hieftje
Keyword(s):  
Inductively Coupled Plasmas ◽  
Mixed Gas ◽  
Inductively Coupled ◽  
Coupled Plasmas

Plasma parameters analysis of various mixed gas inductively coupled plasmas

2002 ◽  
Vol 9 (6) ◽  
pp. 2831-2838 ◽  
Author(s):  
K. H. Bai ◽  
S. J. You ◽  
H. Y. Chang ◽  
H. S. Uhm
Keyword(s):  
Inductively Coupled Plasmas ◽  
Mixed Gas ◽  
Plasma Parameters ◽  
Inductively Coupled ◽  
Parameters Analysis ◽  
Coupled Plasmas
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