High-Resolution Fourier Transform Spectroscopy: Line Widths And Line Shapes Of Spectral Lines Emitted From Helium And Mixed-Gas Inductively Coupled Plasmas

1989 ◽  
Author(s):  
Akbar Montaser ◽  
I. Ishii ◽  
B. A. Palmer ◽  
L. R. Layman ◽  
D. E. Hof
Keyword(s):  
Fourier Transform ◽  
High Resolution ◽  
Fourier Transform Spectroscopy ◽  
Spectral Lines ◽  
Inductively Coupled Plasmas ◽  
Mixed Gas ◽  
Inductively Coupled ◽  
Line Shapes ◽  
Line Widths ◽  
Coupled Plasmas

High resolution pattern transfer in III-nitrides using BCl3/Ar inductively coupled plasmas

1998 ◽  
Vol 42 (9) ◽  
pp. 1719-1722
Author(s):  
Hyun Cho ◽  
S.M Donovan ◽  
J.D MacKenzie ◽  
C.R Abernathy ◽  
S.J Pearton ◽  
...  
Keyword(s):  
High Resolution ◽  
Pattern Transfer ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas

Electron Number Density Measurements in Ar and Ar-N2 Inductively Coupled Plasmas

1982 ◽  
Vol 36 (6) ◽  
pp. 613-617 ◽  
Author(s):  
Akbar Montaser ◽  
Velmer A. Fassel
Keyword(s):  
Spectral Lines ◽  
Signal Recovery ◽  
Gas Flows ◽  
Inductively Coupled Plasmas ◽  
Electron Number ◽  
Excitation Energies ◽  
Experimental Conditions ◽  
Outer Flow ◽  
Inductively Coupled ◽  
Coupled Plasmas

The emission spectrum of the series limit of Al was used to estimate the electron number densities ( n e) in inductively coupled Ar or Ar-N2 plasmas (ICP). The spectra of the series limit were recorded either with a silicon-intensified target vidicon detector or by a computer-controlled, scanning spectrometer. Background stripping was performed on the spectra recorded by both instruments to enhance signal recovery. Under comparable experimental conditions, the n e values in the Ar-supported ICP were higher than those observed in Ar-N2 plasma, when pure N2 was used in the outer flow. However, the n e value of the Ar ICP under the conditions commonly used in analytical laboratories (15 mm observation height and 1200 W forward power) was comparable to that found in pure N2 outer flow, Ar-N2 plasmas operated under conditions (5 mm observation height and 3000 W forward power) suitable for exciting spectral lines of high excitation energies. Whereas the use of higher, carrier gas flows tended to reduce the n e values of the Ar ICP substantially, this trend was not observed for the pure N2 outer flow Ar-N2 plasma.

Fundamental studies of mixed-gas inductively coupled plasmas

1994 ◽  
Vol 49 (12-14) ◽  
pp. 1259-1282 ◽  
Author(s):  
Norman N. Sesi ◽  
Amelia Mackenzie ◽  
Kathryn E. Shanks ◽  
Pengyuan Yang ◽  
Gary M. Hieftje
Keyword(s):  
Inductively Coupled Plasmas ◽  
Mixed Gas ◽  
Inductively Coupled ◽  
Coupled Plasmas
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