High strength, low dielectric constant fluorinated silica xerogel films

2001 ◽  
Vol 79 (24) ◽  
pp. 4010-4012 ◽  
Author(s):  
B. P. Gorman ◽  
Rosa A. Orozco-Teran ◽  
Jodi A. Roepsch ◽  
Hanjiang Dong ◽  
Richard F. Reidy ◽  
...  
Keyword(s):  
Dielectric Constant ◽  
High Strength ◽  
Silica Xerogel ◽  
Low Dielectric Constant ◽  
Low Dielectric ◽  
Xerogel Films

Preparation and Properties of Porous Si3N4/SiO2/BN Composite Ceramics

2012 ◽  
Vol 512-515 ◽  
pp. 828-831 ◽  
Author(s):  
Wei Dong ◽  
Chang An Wang ◽  
Lei Yu ◽  
Shi Xi Ouyang
Keyword(s):  
Dielectric Constant ◽  
Dielectric Properties ◽  
High Strength ◽  
Low Dielectric Constant ◽  
Pressureless Sintering ◽  
Composite Ceramics ◽  
Porous Si ◽  
Low Dielectric ◽  
Dry Pressing ◽  
Porous Si3n4

Porous Si3N4/SiO2/BN composite ceramics with high strength and low dielectric constant were prepared by dry-pressing process and pressureless sintering at 1750°C for 1.5 h in flow nitrogen. The influences of BN content on microstructure, porosity, mechanical and dielectric properties of the porous Si3N4/SiO2/BN composite ceramics were discussed. The results showed that the porous Si3N4/SiO2/BN composite ceramics with porosity ranging from 29% to 48% were fabricated by adjusting the content of BN. The flexural strength of the porous Si3N4/SiO2/BN composite ceramics was 78215 MPa. The dielectric constant of the porous Si3N4/SiO2/BN composite ceramics was 3.9~5 at 1 MHz.

scholarly journals BN Nanoparticles/Si3N4Wave-Transparent Composites with High Strength and Low Dielectric Constant

2011 ◽  
Vol 2011 ◽  
pp. 1-5 ◽  
Author(s):  
Dongliang Zhao ◽  
Yujun Zhang ◽  
Hongyu Gong ◽  
Baoxin Zhu ◽  
Xiaoyu Zhang
Keyword(s):  
Mechanical Properties ◽  
Dielectric Constant ◽  
Volume Content ◽  
Bending Strength ◽  
High Strength ◽  
Low Dielectric Constant ◽  
Low Dielectric ◽  
Transparent Composites ◽  
Gas Pressure Sintering ◽  
Dielectric And Mechanical Properties

Si3N4wave-transparent composites with different volume content of BN nanoparticles (BNnp/Si3N4) were prepared by gas pressure sintering at 1800°C in N2atmosphere. The effects of BN nanoparticles on the dielectric and mechanical properties of BNnp/Si3N4composites were investigated. The results showed that the addition of the BN nanoparticles improved the dielectric properties of BNnp/Si3N4composites effectively and decreased the mechanical properties. When the volume content of BN nanoparticles was 10%, the dielectric constant and dielectric loss tangent were 4.31 and 0.006, respectively, and the bending strength and fracture toughness still reached 198.9 MPa and 3.36 MPa·m1/2. The high mechanical properties of BNnp/Si3N4composites with 10% BN nanoparticles were attributed to homogeneously dispersed BN nanoparticles which were embedded in the pores formed by the rod-likeβ-Si3N4.

High Strength Low Dielectric Constant Aromatic Thermosets

2005 ◽  
Vol 863 ◽  
Author(s):  
Yongqing Huang ◽  
James Economy
Keyword(s):  
Thermal Stability ◽  
Dielectric Constant ◽  
Young’S Modulus ◽  
Breakdown Strength ◽  
Young's Modulus ◽  
Chemical Vapor ◽  
High Strength ◽  
Low Dielectric Constant ◽  
Crosstalk Noise ◽  
Low Dielectric

AbstractContinuing miniaturization of microelectronic devices requires development of low dielectric constant materials to lower the RC delay, power dissipation and crosstalk noise. Although spin-on polymer dielectrics usually have better potential for extendibility to lower dielectric constant (k) values compared to chemical-vapor-deposited dielectrics, their low mechanical properties prevent them from being successfully integrated with copper metal lines.Recent evaluation of a new thermosetting oligomer shows high thermal stability, low moisture pick-up and low dielectric constant. Techniques to optimize the solubility and spin coating characteristics of the oligomer have been developed. The thermally cured polymer displayed a thermal stability up to 480°C in nitrogen and 400°C in air. The cured polymer displayed a dielectric constant of 2.7 at 1 MHz and a breakdown strength larger than 230 V/μm. Nanoindentation testing showed that it had an extraordinarily high Young's modulus of 16.8 GPa and a hardness of 3.5 GPa. By use of porogens, a dielectric constant as low as 1.85 was obtained while still maintaining an acceptable high Young's modulus of 7.7 GPa and hardness of 2.0 GPa. Nanoscratch testing indicated that this material had good adhesion to the Si substrate, and Ta which is a diffusion barrier for copper. These results appear unique compared to all commercially available low-k candidates.

Modification of Low ĸ Materials for ULSI Multilevel Interconnects by Ion Implantation

2002 ◽  
Vol 716 ◽  
Author(s):  
Alok Nandini ◽  
U. Roy ◽  
A. Mallikarjunan ◽  
A. Kumar ◽  
J. Fortin ◽  
...  
Keyword(s):  
Dielectric Constant ◽  
Ion Implantation ◽  
Dielectric Materials ◽  
Dramatic Improvement ◽  
Force Microscopy ◽  
Low Dielectric ◽  
Quantitative Measurements ◽  
Hardness Increase ◽  
Xerogel Films ◽  
Ion Species

AbstractThin films of low dielectric constant (κ) materials such as Xerogel (ĸ=1.76) and SilkTM (ĸ=2.65) were implanted with argon, neon, nitrogen, carbon and helium with 2 x 1015 cm -2 and 1 x 1016 cm -2 dose at energies varying from 50 to 150 keV at room temperature. In this work we discuss the improvement of hardness as well as elasticity of low ĸ dielectric materials by ion implantation. Ultrasonic Force Microscopy (UFM) [6] and Nano indentation technique [5] have been used for qualitative and quantitative measurements respectively. The hardness increased with increasing ion energy and dose of implantation. For a given energy and dose, the hardness improvement varied with ion species. Dramatic improvement of hardness is seen for multi-dose implantation. Among all the implanted ion species (Helium, Carbon, Nitrogen, Neon and Argon), Argon implantation resulted in 5x hardness increase in Xerogel films, sacrificing only a slight increase (∼ 15%) in dielectric constant.

Structire, Properties, and Process Characteristics of Low-K Materials Prepared by PECVD

1999 ◽  
Vol 565 ◽  
Author(s):  
Y. Shimogaki ◽  
S. W. Lim ◽  
E. G. Loh ◽  
Y. Nakano ◽  
K. Tada ◽  
...  
Keyword(s):  
Growth Rate ◽  
Dielectric Constant ◽  
Gas Flow ◽  
Structural Changes ◽  
Silicon Oxide ◽  
Reactive Species ◽  
Low Dielectric Constant ◽  
Low Dielectric ◽  
Step Coverage ◽  
Low K

AbstractLow dielectric constant F-doped silicon oxide films (SiO:F) can be prepared by adding fluorine source, like as CF4 to the conventional PECVD processes. We could obtain SiO:F films with dielectric constant as low as 2.6 from the reaction mixture of SiH4/N2 O/CF4. The structural changes of the oxides were sensitively detected by Raman spectroscopy. The three-fold ring and network structure of the silicon oxides were selectively decreased by adding fluorine into the film. These structural changes contribute to the decrease ionic polarization of the film, but it was not the major factor for the low dielectric constant. The addition of fluorine was very effective to eliminate the Si-OH in the film and the disappearance of the Si-OH was the key factor to obtain low dielectric constant. A kinetic analysis of the process was also performed to investigate the reaction mechanism. We focused on the effect of gas flow rate, i.e. the residence time of the precursors in the reactor, on growth rate and step coverage of SiO:F films. It revealed that there exists two species to form SiO:F films. One is the reactive species which contributes to increase the growth rate and the other one is the less reactive species which contributes to have uniform step coverage. The same approach was made on the PECVD process to produce low-k C:F films from C2F4, and we found ionic species is the main precursor to form C:F films.

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