High quality ZnO thin films grown by plasma enhanced chemical vapor deposition

B. S. Li; Y. C. Liu; Z. S. Chu; D. Z. Shen; Y. M. Lu; J. Y. Zhang; X. W. Fan

doi:10.1063/1.1415545

High quality ZnO thin films grown by plasma enhanced chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.1415545 ◽

2002 ◽

Vol 91 (1) ◽

pp. 501 ◽

Cited By ~ 81

Author(s):

B. S. Li ◽

Y. C. Liu ◽

Z. S. Chu ◽

D. Z. Shen ◽

Y. M. Lu ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Zno Thin Films ◽

High Quality

Download Full-text

Growth of high quality ZnO thin films at low temperature on Si(100) substrates by plasma enhanced chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1430427 ◽

2002 ◽

Vol 20 (1) ◽

pp. 265-269 ◽

Cited By ~ 20

Author(s):

B. S. Li ◽

Y. C. Liu ◽

D. Z. Shen ◽

Y. M. Lu ◽

J. Y. Zhang ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Zno Thin Films ◽

High Quality

Download Full-text

Defect distribution in ZnO thin films grown on a-plane sapphire substrates by catalytic-reaction-assisted chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2021.126206 ◽

2021 ◽

pp. 126206

Author(s):

Taro Saito ◽

Ariyuki Kato ◽

Kanji Yasui

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Catalytic Reaction ◽

Vapor Deposition ◽

Chemical Vapor ◽

Zno Thin Films ◽

Defect Distribution ◽

Sapphire Substrates

Download Full-text

Improved optical transmittance of boron doped ZnO thin films by low pressure chemical vapor deposition with pulse boron doping

2011 37th IEEE Photovoltaic Specialists Conference ◽

10.1109/pvsc.2011.6186195 ◽

2011 ◽

Author(s):

Chang-Soo Lee ◽

B. T. Ahn

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Boron Doping ◽

Optical Transmittance ◽

Zno Thin Films ◽

Boron Doped ◽

Pressure Chemical ◽

Doped Zno

Download Full-text

Low-pressure metalorganic chemical vapor deposition of high-quality AlN and GaN thin films on sapphire and silicon substrates

10.1117/12.206881 ◽

1995 ◽

Cited By ~ 2

Author(s):

Patrick Kung ◽

Xiaolong Zhang ◽

Erwan Bigan ◽

Manijeh Razeghi ◽

Adam W. Saxler

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

Silicon Substrates ◽

High Quality ◽

Metalorganic Chemical

Download Full-text

Unintentional doping and compensation effects of carbon in metal-organic chemical-vapor deposition fabricated ZnO thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.2167981 ◽

2006 ◽

Vol 24 (4) ◽

pp. 1213-1217 ◽

Cited By ~ 26

Author(s):

Xiaonan Li ◽

Sally E. Asher ◽

Sukit Limpijumnong ◽

S. B. Zhang ◽

Su-Huai Wei ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

Unintentional Doping ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Thickness dependence of microstructure and properties of ZnO thin films deposited by metal-organic chemical vapor deposition using ultrasonic nebulization

Thin Solid Films ◽

10.1016/j.tsf.2013.05.029 ◽

2013 ◽

Vol 546 ◽

pp. 38-41 ◽

Cited By ~ 14

Author(s):

Choon-Ho Lee ◽

Do-Woo Kim

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Thickness Dependence ◽

Zno Thin Films ◽

Organic Chemical ◽

Ultrasonic Nebulization ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Preparation of ZnO Thin Films Deposited by Plasma Chemical Vapor Deposition for Application to Ultraviolet-cut Coating

Japanese Journal of Applied Physics ◽

10.1143/jjap.40.6099 ◽

2001 ◽

Vol 40 (Part 1, No. 10) ◽

pp. 6099-6103 ◽

Cited By ~ 13

Author(s):

Hidetaka Anma ◽

Yuuji Yoshimoto ◽

Mariko Tanaka ◽

Hiroyuki Takatsuka ◽

Yoshinori Hatanaka

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Zno Thin Films ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

Download Full-text

Effects of annealing treatment on the formation of CO2 in ZnO thin films grown by metal-organic chemical vapor deposition

Applied Surface Science ◽

10.1016/j.apsusc.2009.10.109 ◽

2010 ◽

Vol 256 (8) ◽

pp. 2606-2610 ◽

Cited By ~ 14

Author(s):

Gaolin Zheng ◽

Anli Yang ◽

Hongyuan Wei ◽

Xianglin Liu ◽

Huaping Song ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Annealing Treatment ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Thermally stable transparent conducting and highly infrared reflective Ga-doped ZnO thin films by metal organic chemical vapor deposition

Optical Materials ◽

10.1016/j.optmat.2010.12.008 ◽

2011 ◽

Vol 33 (6) ◽

pp. 768-772 ◽

Cited By ~ 55

Author(s):

J.L. Zhao ◽

X.W. Sun ◽

H. Ryu ◽

Y.B. Moon

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

Transparent Conducting ◽

Metal Organic ◽

Doped Zno ◽

Organic Chemical Vapor Deposition

Download Full-text

Growth of a-plane ZnO thin films on LaAlO3(100) substrate by metal-organic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2007.11.073 ◽

2008 ◽

Vol 310 (4) ◽

pp. 777-782 ◽

Cited By ~ 32

Author(s):

Jr-Sheng Tian ◽

Mei-Hui Liang ◽

Yen-Teng Ho ◽

Yuan-An Liu ◽

Li Chang

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text