Growth of high quality ZnO thin films at low temperature on Si(100) substrates by plasma enhanced chemical vapor deposition

2002 ◽  
Vol 20 (1) ◽  
pp. 265-269 ◽  
Author(s):  
B. S. Li ◽  
Y. C. Liu ◽  
D. Z. Shen ◽  
Y. M. Lu ◽  
J. Y. Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Zno Thin Films ◽  
High Quality

High quality ZnO thin films grown by plasma enhanced chemical vapor deposition

2002 ◽  
Vol 91 (1) ◽  
pp. 501 ◽  
Author(s):  
B. S. Li ◽  
Y. C. Liu ◽  
Z. S. Chu ◽  
D. Z. Shen ◽  
Y. M. Lu ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Zno Thin Films ◽  
High Quality

Transparent conducting indium oxide thin films grown by low-temperature metal organic chemical vapor deposition

2007 ◽  
Vol 515 (5) ◽  
pp. 2921-2925 ◽  
Author(s):  
Chunyu Wang ◽  
Volker Cimalla ◽  
Genady Cherkashinin ◽  
Henry Romanus ◽  
Majdeddin Ali ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Indium Oxide ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Transparent Conducting ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
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