Unintentional doping and compensation effects of carbon in metal-organic chemical-vapor deposition fabricated ZnO thin films

Xiaonan Li; Sally E. Asher; Sukit Limpijumnong; S. B. Zhang; Su-Huai Wei; Teresa M. Barnes; Timothy J. Coutts; Rommel Noufi

doi:10.1116/1.2167981

Unintentional doping and compensation effects of carbon in metal-organic chemical-vapor deposition fabricated ZnO thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.2167981 ◽

2006 ◽

Vol 24 (4) ◽

pp. 1213-1217 ◽

Cited By ~ 26

Author(s):

Xiaonan Li ◽

Sally E. Asher ◽

Sukit Limpijumnong ◽

S. B. Zhang ◽

Su-Huai Wei ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

Unintentional Doping ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Thickness dependence of microstructure and properties of ZnO thin films deposited by metal-organic chemical vapor deposition using ultrasonic nebulization

Thin Solid Films ◽

10.1016/j.tsf.2013.05.029 ◽

2013 ◽

Vol 546 ◽

pp. 38-41 ◽

Cited By ~ 14

Author(s):

Choon-Ho Lee ◽

Do-Woo Kim

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Thickness Dependence ◽

Zno Thin Films ◽

Organic Chemical ◽

Ultrasonic Nebulization ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Effects of annealing treatment on the formation of CO2 in ZnO thin films grown by metal-organic chemical vapor deposition

Applied Surface Science ◽

10.1016/j.apsusc.2009.10.109 ◽

2010 ◽

Vol 256 (8) ◽

pp. 2606-2610 ◽

Cited By ~ 14

Author(s):

Gaolin Zheng ◽

Anli Yang ◽

Hongyuan Wei ◽

Xianglin Liu ◽

Huaping Song ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Annealing Treatment ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Thermally stable transparent conducting and highly infrared reflective Ga-doped ZnO thin films by metal organic chemical vapor deposition

Optical Materials ◽

10.1016/j.optmat.2010.12.008 ◽

2011 ◽

Vol 33 (6) ◽

pp. 768-772 ◽

Cited By ~ 55

Author(s):

J.L. Zhao ◽

X.W. Sun ◽

H. Ryu ◽

Y.B. Moon

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

Transparent Conducting ◽

Metal Organic ◽

Doped Zno ◽

Organic Chemical Vapor Deposition

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Growth of a-plane ZnO thin films on LaAlO3(100) substrate by metal-organic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2007.11.073 ◽

2008 ◽

Vol 310 (4) ◽

pp. 777-782 ◽

Cited By ~ 32

Author(s):

Jr-Sheng Tian ◽

Mei-Hui Liang ◽

Yen-Teng Ho ◽

Yuan-An Liu ◽

Li Chang

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Study of arsenic doping ZnO thin films grown by metal–organic chemical vapor deposition via x-ray photoelectron spectroscopy

Journal of Physics Condensed Matter ◽

10.1088/0953-8984/20/29/292202 ◽

2008 ◽

Vol 20 (29) ◽

pp. 292202 ◽

Cited By ~ 19

Author(s):

Hesong Guan ◽

Xiaochuan Xia ◽

Yuantao Zhang ◽

Fubin Gao ◽

Wancheng Li ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Photoelectron Spectroscopy ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

X Ray ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Structural and optical properties of a-plane ZnO thin films synthesized on γ-LiAlO2 (302) substrates by low pressure metal-organic chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2007.10.128 ◽

2008 ◽

Vol 516 (18) ◽

pp. 6079-6082 ◽

Cited By ~ 17

Author(s):

Hui Lin ◽

Shengming Zhou ◽

Jianhua Zhou ◽

Xuedong Liu ◽

Shulin Gu ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

Structural And Optical Properties ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Fabrication of Ag nanoparticle/ZnO thin films using dual-plasma-enhanced metal-organic chemical vapor deposition (DPEMOCVD) system incorporated with photoreduction method and its application

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2016.09.039 ◽

2017 ◽

Vol 57 ◽

pp. 220-226 ◽

Cited By ~ 6

Author(s):

Po-Hsun Lei ◽

Chun-Han Cheng

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

Ag Nanoparticle ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Preparation of Ga-Doped ZnO Thin Films by Metal-Organic Chemical Vapor Deposition with Ultrasonic Nebulization

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2016.13550 ◽

2016 ◽

Vol 16 (11) ◽

pp. 11552-11557 ◽

Cited By ~ 2

Author(s):

Choon-Ho Lee ◽

Seong-Hoon Oh

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

Ultrasonic Nebulization ◽

Metal Organic ◽

Doped Zno ◽

Organic Chemical Vapor Deposition

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Growth and Characterization of Single Crystalline Ga-doped ZnO Thin Films Using Metal-Organic Chemical Vapor Deposition

ECS Meeting Abstracts ◽

10.1149/ma2013-01/23/935 ◽

2013 ◽

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

Metal Organic ◽

Doped Zno ◽

Organic Chemical Vapor Deposition

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Effects of the deposition condition on the microstructure and properties of ZnO thin films deposited by metal organic chemical vapor deposition with ultrasonic nebulization

Thin Solid Films ◽

10.1016/j.tsf.2015.09.050 ◽

2016 ◽

Vol 605 ◽

pp. 157-162 ◽

Cited By ~ 6

Author(s):

Choon-Ho Lee ◽

Min-Seok Choi

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

Deposition Condition ◽

Ultrasonic Nebulization ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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