Performance of Co/Al2O3/NiFe magnetic tunnel junctions prepared by a two-step rf plasma oxidation method

2001 ◽  
Vol 79 (8) ◽  
pp. 1160-1162 ◽  
Author(s):  
K. S. Yoon ◽  
J. H. Park ◽  
J. H. Choi ◽  
J. Y. Yang ◽  
C. H. Lee ◽  
...  
Keyword(s):  
Tunnel Junctions ◽  
Magnetic Tunnel Junctions ◽  
Rf Plasma ◽  
Plasma Oxidation ◽  
Oxidation Method

Efficient characterization of ultrathin AlOx insulating barriers in magnetic tunnel junctions fabricated by masked rf plasma oxidation technique

2002 ◽  
Vol 80 (21) ◽  
pp. 3982-3984 ◽  
Author(s):  
J. H. Park ◽  
G. S. Lee ◽  
J. Y. Yang ◽  
K. S. Yoon ◽  
C. O. Kim ◽  
...  
Keyword(s):  
Tunnel Junctions ◽  
Magnetic Tunnel Junctions ◽  
Rf Plasma ◽  
Plasma Oxidation

Oxide Growth of Tin Films by Modified rf Plasma Oxidation Method

1980 ◽  
Vol 19 (8) ◽  
pp. 1566-1566
Author(s):  
Nobuyuki Takahashi ◽  
Osamu Yokoyama ◽  
Seizo Morita ◽  
Nobuo Mikoshiba
Keyword(s):  
Rf Plasma ◽  
Oxide Growth ◽  
Plasma Oxidation ◽  
Oxidation Method ◽  
Tin Films

Low-resistance magnetic tunnel junctions prepared by partial remote plasma oxidation of 0.9nm Al barriers

2005 ◽  
Vol 86 (19) ◽  
pp. 192502 ◽  
Author(s):  
Ricardo Ferreira ◽  
Paulo P. Freitas ◽  
Maureen MacKenzie ◽  
John N. Chapman
Keyword(s):  
Tunnel Junctions ◽  
Magnetic Tunnel Junctions ◽  
Plasma Oxidation ◽  
Remote Plasma ◽  
Low Resistance ◽  
Remote Plasma Oxidation

scholarly journals Real-time monitoring of plasma oxidation dynamics of subnanometer Al2O3 barriers for magnetic tunnel junctions

2006 ◽  
Vol 88 (3) ◽  
pp. 031909 ◽  
Author(s):  
C. G. C. H. M. Fabrie ◽  
K. Knechten ◽  
J. T. Kohlhepp ◽  
H. J. M. Swagten ◽  
B. Koopmans ◽  
...  
Keyword(s):  
Real Time ◽  
Tunnel Junctions ◽  
Magnetic Tunnel Junctions ◽  
Plasma Oxidation ◽  
Real Time Monitoring

A new rf plasma oxidation method for the insulating AlOx barrier in magnetic tunneling junctions

2002 ◽  
Vol 2 (5) ◽  
pp. 355-358
Author(s):  
K.S Yoon ◽  
J.Y Yang ◽  
J.H Park ◽  
W.J Choi ◽  
Y.D Kim ◽  
...  
Keyword(s):  
Rf Plasma ◽  
Plasma Oxidation ◽  
Oxidation Method ◽  
Tunneling Junctions ◽  
Magnetic Tunneling Junctions ◽  
Magnetic Tunneling
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