Atom-scale optical determination of Si-oxide layer thickness during layer-by-layer oxidation: Theoretical study
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1999 ◽
Vol 17
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pp. 2191
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2014 ◽
Vol 202
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pp. 217-223
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pp. 1746-1749
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2018 ◽
Vol 924
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Vol 718
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pp. 104-111
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