Enhanced quality of epitaxial AlN thin films on 6H–SiC by ultra-high-vacuum ion-assisted reactive dc magnetron sputter deposition

2000 ◽  
Vol 76 (2) ◽  
pp. 170-172 ◽  
Author(s):  
S. Tungasmita ◽  
J. Birch ◽  
P. O. Å. Persson ◽  
K. Järrendahl ◽  
L. Hultman
Keyword(s):  
Thin Films ◽  
High Vacuum ◽  
Sputter Deposition ◽  
Ultra High Vacuum ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

Ultra-high vacuum dc magnetron sputter-deposition of 0001-textured trigonal α-Ta2C/Al2O3(0001) thin films

Materialia ◽  
2020 ◽  
Vol 13 ◽  
pp. 100838 ◽  
Author(s):  
Koichi Tanaka ◽  
Angel Aleman ◽  
Hicham Zaid ◽  
Michael E. Liao ◽  
Koki Hojo ◽  
...  
Keyword(s):  
Thin Films ◽  
High Vacuum ◽  
Sputter Deposition ◽  
Ultra High Vacuum ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

Single‐target magnetron sputter deposition of high‐Tcsuperconducting Bi‐Sr‐Ca‐Cu‐O thin films

1988 ◽  
Vol 64 (10) ◽  
pp. 5259-5261 ◽  
Author(s):  
Neelkanth G. Dhere ◽  
John P. Goral ◽  
Alice R. Mason ◽  
Ramesh G. Dhere ◽  
Ronald H. Ono
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
Single Target ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

Single composite target magnetron sputter deposition of crystalline and amorphous SiC thin films

2018 ◽  
Vol 5 (3) ◽  
pp. 036410 ◽  
Author(s):  
Poreddy Chaitanya Akshara ◽  
Guruswamy Rajaram ◽  
M Ghanashyam Krishna
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
Composite Target ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter ◽  
Amorphous Sic
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