Microstructure and electronic properties of the refractory semiconductor ScN grown on MgO(001) by ultra-high-vacuum reactive magnetron sputter deposition

1998 ◽  
Vol 16 (4) ◽  
pp. 2411-2417 ◽  
Author(s):  
D. Gall ◽  
I. Petrov ◽  
L. D. Madsen ◽  
J.-E. Sundgren ◽  
J. E. Greene
Keyword(s):  
Electronic Properties ◽  
High Vacuum ◽  
Sputter Deposition ◽  
Ultra High Vacuum ◽  
Reactive Magnetron ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

Enhanced quality of epitaxial AlN thin films on 6H–SiC by ultra-high-vacuum ion-assisted reactive dc magnetron sputter deposition

2000 ◽  
Vol 76 (2) ◽  
pp. 170-172 ◽  
Author(s):  
S. Tungasmita ◽  
J. Birch ◽  
P. O. Å. Persson ◽  
K. Järrendahl ◽  
L. Hultman
Keyword(s):  
Thin Films ◽  
High Vacuum ◽  
Sputter Deposition ◽  
Ultra High Vacuum ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

Ultra-high vacuum dc magnetron sputter-deposition of 0001-textured trigonal α-Ta2C/Al2O3(0001) thin films

Materialia ◽  
2020 ◽  
Vol 13 ◽  
pp. 100838 ◽  
Author(s):  
Koichi Tanaka ◽  
Angel Aleman ◽  
Hicham Zaid ◽  
Michael E. Liao ◽  
Koki Hojo ◽  
...  
Keyword(s):  
Thin Films ◽  
High Vacuum ◽  
Sputter Deposition ◽  
Ultra High Vacuum ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

Ion-assisted low-temperature (≤ 150 °C) epitaxial growth of TiN on Cu by reactive magnetron sputter deposition

1996 ◽  
Vol 287 (1-2) ◽  
pp. 87-92 ◽  
Author(s):  
H. Ljungcrantz ◽  
S. Benhenda ◽  
G. Håkansson ◽  
I. Ivanov ◽  
L. Hultman ◽  
...  
Keyword(s):  
Low Temperature ◽  
Epitaxial Growth ◽  
Sputter Deposition ◽  
Reactive Magnetron ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

Single crystal wurtzite GaN on (111) GaAs with AlN buffer layers grown by reactive magnetron sputter deposition

1993 ◽  
Vol 8 (10) ◽  
pp. 2613-2616 ◽  
Author(s):  
Jennifer Ross ◽  
Mike Rubin ◽  
T.K. Gustafson
Keyword(s):  
Single Crystal ◽  
Growth Conditions ◽  
Sputter Deposition ◽  
Buffer Layers ◽  
Reactive Magnetron ◽  
X Ray Diffraction ◽  
Reactive Sputter Deposition ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter ◽  
Aln Buffer

We report the growth conditions necessary for highly oriented wurtzite GaN films on (111) GaAs, and single crystal GaN films on (111) GaAs using AlN buffer layers. The GaN films and AlN buffers are grown using rf reactive magnetron sputter deposition. Oriented basal plane wurtzite GaN is obtained on (111) GaAs at temperatures between 550 and 620 °C. However, using a high temperature 200 Å AlN buffer layer epitaxial GaN is produced. Crystal structure and quality are measured using x-ray diffraction (XRD), reflection electron diffraction (RED), and a scanning electron microscope (SEM). This is the first report of single crystal wurtzite GaN on (111) GaAs using AlN buffer layers by any growth technique. Simple AlN/GaN heterostructures grown by rf reactive sputter deposition on (111) GaAs are also demonstrated.

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