Surface smoothing of floating gates in flash memory devices via surface nitrogen and carbon incorporation
Keyword(s):
2018 ◽
Vol 10
(37)
◽
pp. 31480-31487
◽
2011 ◽
Vol E94-A
(11)
◽
pp. 2453-2457
2013 ◽
Vol 60
(10)
◽
pp. 3256-3264
◽
2010 ◽
Vol 31
(9)
◽
pp. 1038-1040
◽
1996 ◽
Vol 35
(Part 1, No. 6A)
◽
pp. 3369-3373
◽