Evidence of discrete interface traps on thermally grown thin silicon oxide films

1999 ◽  
Vol 74 (2) ◽  
pp. 257-259 ◽  
Author(s):  
Jin Cai ◽  
Chih-Tang Sah
Keyword(s):  
Silicon Oxide ◽  
Oxide Films ◽  
Interface Traps ◽  
Thin Silicon ◽  
Thermally Grown

The Effect of a Silicon-Boron Phase on Thermally Grown Silicon Oxide Films

1970 ◽  
Vol 117 (2) ◽  
pp. 272 ◽  
Author(s):  
William A. FitzGibbons ◽  
Thomas Kloffenstein ◽  
Karl M. Busen
Keyword(s):  
Silicon Oxide ◽  
Oxide Films ◽  
Thermally Grown

Tunnel current in n-poly-Si/SiO2/n-Si structures with the 40–75 Å thermally grown silicon oxide films under very strong fields

1993 ◽  
Vol 65-66 ◽  
pp. 835-839 ◽  
Author(s):  
O.G. Balev ◽  
S.G. Bantser ◽  
A.I. Klimovskaja ◽  
Y.A. Okhrimenko ◽  
E.M. Kostenko ◽  
...  
Keyword(s):  
Silicon Oxide ◽  
Oxide Films ◽  
Tunnel Current ◽  
Strong Fields ◽  
Thermally Grown

Low‐level leakage currents in thin silicon oxide films

1994 ◽  
Vol 76 (1) ◽  
pp. 319-327 ◽  
Author(s):  
D. J. Dumin ◽  
J. R. Cooper ◽  
J. R. Maddux ◽  
R. S. Scott ◽  
D.‐P. Wong
Keyword(s):  
Silicon Oxide ◽  
Oxide Films ◽  
Leakage Currents ◽  
Low Level ◽  
Thin Silicon

scholarly journals Introducing pinhole magnification by selective etching: application to poly-Si on ultra-thin silicon oxide films

2017 ◽  
Vol 124 ◽  
pp. 435-440 ◽  
Author(s):  
Dominic Tetzlaff ◽  
Marvin Dzinnik ◽  
Jan Krügener ◽  
Yevgeniya Larionova ◽  
Sina Reiter ◽  
...  
Keyword(s):  
Silicon Oxide ◽  
Oxide Films ◽  
Selective Etching ◽  
Thin Silicon

Formation of thin silicon oxide films by rapid thermal heating

1986 ◽  
Vol 59 (11) ◽  
pp. 3921-3923 ◽  
Author(s):  
J. P. Ponpon ◽  
J. J. Grob ◽  
A. Grob ◽  
R. Stuck
Keyword(s):  
Silicon Oxide ◽  
Oxide Films ◽  
Thermal Heating ◽  
Thin Silicon

Growth mechanism of thin silicon oxide films on Si(100) studied by medium-energy ion scattering

1995 ◽  
Vol 52 (3) ◽  
pp. 1759-1775 ◽  
Author(s):  
E. P. Gusev ◽  
H. C. Lu ◽  
T. Gustafsson ◽  
E. Garfunkel
Keyword(s):  
Growth Mechanism ◽  
Silicon Oxide ◽  
Oxide Films ◽  
Medium Energy ◽  
Ion Scattering ◽  
Thin Silicon ◽  
Medium Energy Ion Scattering
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