A Nondestructive Measurement of Thickness and Composition of Thin Silicon Oxide Films

1972 ◽  
Vol 9 (3) ◽  
pp. 1049-1052 ◽  
Author(s):  
Marlin L. White ◽  
L. A. Weitzenkamp
Keyword(s):  
Silicon Oxide ◽  
Oxide Films ◽  
Nondestructive Measurement ◽  
Thin Silicon ◽  
Measurement Of Thickness

Low‐level leakage currents in thin silicon oxide films

1994 ◽  
Vol 76 (1) ◽  
pp. 319-327 ◽  
Author(s):  
D. J. Dumin ◽  
J. R. Cooper ◽  
J. R. Maddux ◽  
R. S. Scott ◽  
D.‐P. Wong
Keyword(s):  
Silicon Oxide ◽  
Oxide Films ◽  
Leakage Currents ◽  
Low Level ◽  
Thin Silicon

scholarly journals Introducing pinhole magnification by selective etching: application to poly-Si on ultra-thin silicon oxide films

2017 ◽  
Vol 124 ◽  
pp. 435-440 ◽  
Author(s):  
Dominic Tetzlaff ◽  
Marvin Dzinnik ◽  
Jan Krügener ◽  
Yevgeniya Larionova ◽  
Sina Reiter ◽  
...  
Keyword(s):  
Silicon Oxide ◽  
Oxide Films ◽  
Selective Etching ◽  
Thin Silicon

Formation of thin silicon oxide films by rapid thermal heating

1986 ◽  
Vol 59 (11) ◽  
pp. 3921-3923 ◽  
Author(s):  
J. P. Ponpon ◽  
J. J. Grob ◽  
A. Grob ◽  
R. Stuck
Keyword(s):  
Silicon Oxide ◽  
Oxide Films ◽  
Thermal Heating ◽  
Thin Silicon

Growth mechanism of thin silicon oxide films on Si(100) studied by medium-energy ion scattering

1995 ◽  
Vol 52 (3) ◽  
pp. 1759-1775 ◽  
Author(s):  
E. P. Gusev ◽  
H. C. Lu ◽  
T. Gustafsson ◽  
E. Garfunkel
Keyword(s):  
Growth Mechanism ◽  
Silicon Oxide ◽  
Oxide Films ◽  
Medium Energy ◽  
Ion Scattering ◽  
Thin Silicon ◽  
Medium Energy Ion Scattering

Structural evolution of very thin silicon oxide films during thermal growth in dry oxygen

1984 ◽  
Vol 44 (1) ◽  
pp. 48-50 ◽  
Author(s):  
B. Agius ◽  
S. Rigo ◽  
F. Rochet ◽  
M. Froment ◽  
C. Maillot ◽  
...  
Keyword(s):  
Silicon Oxide ◽  
Oxide Films ◽  
Structural Evolution ◽  
Thermal Growth ◽  
Thin Silicon

Modeling the growth of thin silicon oxide films on silicon

1996 ◽  
Vol 80 (4) ◽  
pp. 2467-2470 ◽  
Author(s):  
Sima Dimitrijev ◽  
H. Barry Harrison
Keyword(s):  
Silicon Oxide ◽  
Oxide Films ◽  
Thin Silicon
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