Kinetics of strain relaxation through misfit dislocation formation in the growth of epitaxial films on compliant substrates

1998 ◽  
Vol 73 (6) ◽  
pp. 753-755 ◽  
Author(s):  
Dimitrios Maroudas ◽  
Luis A. Zepeda-Ruiz ◽  
W. Henry Weinberg
Keyword(s):  
Misfit Dislocation ◽  
Strain Relaxation ◽  
Epitaxial Films ◽  
Compliant Substrates ◽  
Kinetics Of ◽  
Dislocation Formation

Mechanisms and Kinetics of Misfit Dislocation Formation in Heteroepitaxial Thin Films

1990 ◽  
Vol 188 ◽  
Author(s):  
W. D. Nix ◽  
D. B. Noble ◽  
J. F. Turlo
Keyword(s):  
Misfit Dislocation ◽  
Strain Relaxation ◽  
Dislocation Motion ◽  
Dislocation Nucleation ◽  
Dislocation Segment ◽  
Threading Dislocation ◽  
Misfit Dislocations ◽  
Film Substrate ◽  
Kinetics Of ◽  
Dislocation Formation

ABSTRACTThe mechanisms and kinetics of forming misfit dislocations in heteroepitaxial films are studied. The critical thickness for misfit dislocation formation can be found by considering the incremental extension of a misfit dislocation by the movement of a “threading” dislocation segment that extends from the film/substrate interface to the free surface of the film. This same mechanism allows one to examine the kinetics of dislocation motion and to illuminate the importance of dislocation nucleation and multiplication in strain relaxation. The effects of unstrained epitaxial capping layers on these processes are also considered. The major effects of such capping layers are to inhibit dislocation nucleation and multiplication. The effect of the capping layer on the velocity of the “threading” dislocation is shown to be small by comparison.A new substrate curvature technique for measuring the strain and studying the kinetics of strain relaxation in heteroepitaxial films is also briefly described.

Kinetics of strain relaxation through misfit dislocation formation in InAs/GaAs(111)A heteroepitaxy

1999 ◽  
Vol 441 (2-3) ◽  
pp. L911-L916 ◽  
Author(s):  
Luis A. Zepeda-Ruiz ◽  
Brett Z. Nosho ◽  
Rodney I. Pelzel ◽  
W.Henry Weinberg ◽  
Dimitrios Maroudas
Keyword(s):  
Misfit Dislocation ◽  
Strain Relaxation ◽  
Kinetics Of ◽  
Dislocation Formation

A model of strain relaxation in hetero-epitaxial films on compliant substrates

1998 ◽  
Vol 66 (1) ◽  
pp. 13-22 ◽  
Author(s):  
G. Kästner ◽  
U. Gösele ◽  
T.Y. Tan
Keyword(s):  
Strain Relaxation ◽  
Epitaxial Films ◽  
Compliant Substrates

The Roles of Stress, Geometry and Orientation on Misfit Dislocations Kinetics and Energetics in Epitaxial Strained Layers.

1991 ◽  
Vol 239 ◽  
Author(s):  
R. Hull ◽  
J. C. Bean ◽  
F. Ross ◽  
D. Bahnck ◽  
L. J. Pencolas
Keyword(s):  
Misfit Dislocation ◽  
Lattice Mismatch ◽  
Strain Relaxation ◽  
Misfit Dislocations ◽  
Slip Systems ◽  
Strained Layers ◽  
Burgers Vector ◽  
Partial Dislocations ◽  
Strain Stress ◽  
Kinetics Of

ABSTRACTThe geometries, microstructures, energetics and kinetics of misfit dislocations as functions of surface orientation and the magnitude of strain/stress are investigated experimentally and theoretically. Examples are drawn from (100), (110) and (111) surfaces and from the GexSi1–x/Si and InxGa1–x/GaAs systems. It is shown that the misfit dislocation geometries and microstructures at lattice mismatch stresses < - 1GPa may in general be predicted by operation of the minimum magnitude Burgers vector slipping on the widest spaced planes. At stresses of the order several GPa, however, new dislocation systems may become operative with either modified Burgers vectors or slip systems. Dissociation of totál misfit dislocations into partial dislocations is found to play a crucial role in strain relaxation, on surfaces other than (100) under compressive stress.

scholarly journals An atomistically validated continuum model for strain relaxation and misfit dislocation formation

2016 ◽  
Vol 91 ◽  
pp. 265-277 ◽  
Author(s):  
X.W. Zhou ◽  
D.K. Ward ◽  
J.A. Zimmerman ◽  
J.L. Cruz-Campa ◽  
D. Zubia ◽  
...  
Keyword(s):  
Misfit Dislocation ◽  
Continuum Model ◽  
Strain Relaxation ◽  
Dislocation Formation

Relationship between misfit-dislocation formation and initial threading-dislocation density in GaInN/GaN heterostructures

2015 ◽  
Vol 54 (11) ◽  
pp. 115501 ◽  
Author(s):  
Motoaki Iwaya ◽  
Taiji Yamamoto ◽  
Daisuke Iida ◽  
Yasunari Kondo ◽  
Mihoko Sowa ◽  
...  
Keyword(s):  
Dislocation Density ◽  
Misfit Dislocation ◽  
Threading Dislocation ◽  
Threading Dislocation Density ◽  
Dislocation Formation

Development of Cross-Hatch Morphology During Growth of Lattice Mismatched Layers

2001 ◽  
Vol 673 ◽  
Author(s):  
A. Maxwell Andrews ◽  
J.S. Speck ◽  
A.E. Romanov ◽  
M. Bobeth ◽  
W. Pompe
Keyword(s):  
Misfit Dislocation ◽  
Film Growth ◽  
Strain Relaxation ◽  
Dislocation Generation ◽  
Force Microscopy ◽  
Step Flow ◽  
Atomic Force ◽  
Subsequent Step ◽  
Step Flow Growth ◽  
Lateral Scale

ABSTRACTAn approach is developed for understanding the cross-hatch morphology in lattice mismatched heteroepitaxial film growth. It is demonstrated that both strain relaxation associated with misfit dislocation formation and subsequent step elimination (e.g. by step-flow growth) are responsible for the appearance of nanoscopic surface height undulations (0.1-10 nm) on a mesoscopic (∼100 nm) lateral scale. The results of Monte Carlo simulations for dislocation- assisted strain relaxation and subsequent film growth predict the development of cross-hatch patterns with a characteristic surface undulation magnitude ∼50 Å in an approximately 70% strain relaxed In0.25Ga0.75As layers. The model is supported by atomic force microscopy (AFM) observations of cross-hatch morphology in the same composition samples grown well beyond the critical thickness for misfit dislocation generation.

The effect of implantation temperature on the mechanism of misfit dislocation formation

1978 ◽  
Vol 45 (2) ◽  
pp. 377-385 ◽  
Author(s):  
V. V. Kalinin ◽  
N. N. Gerasimenko ◽  
S. I. Stenin
Keyword(s):  
Misfit Dislocation ◽  
Implantation Temperature ◽  
Dislocation Formation
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