Electron cyclotron resonance plasma assisted sputter deposition of boron nitride films

1997 ◽  
Vol 70 (5) ◽  
pp. 628-630 ◽  
Author(s):  
G. Mohan Rao ◽  
S. B. Krupanidhi
Keyword(s):  
Boron Nitride ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Sputter Deposition ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Boron Nitride Films ◽  
Resonance Plasma

Cubic boron nitride films deposited by electron cyclotron resonance plasma

1990 ◽  
Vol 57 (18) ◽  
pp. 1885-1886 ◽  
Author(s):  
S. Y. Shapoval ◽  
V. T. Petrashov ◽  
O. A. Popov ◽  
A. O. Westner ◽  
M. D. Yoder ◽  
...  
Keyword(s):  
Boron Nitride ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Cubic Boron Nitride ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Boron Nitride Films ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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