Cubic boron nitride films deposited by electron cyclotron resonance plasma

S. Y. Shapoval; V. T. Petrashov; O. A. Popov; A. O. Westner; M. D. Yoder; C. K. C. Lok

doi:10.1063/1.104000

Cubic boron nitride films deposited by electron cyclotron resonance plasma

Applied Physics Letters ◽

10.1063/1.104000 ◽

1990 ◽

Vol 57 (18) ◽

pp. 1885-1886 ◽

Cited By ~ 43

Author(s):

S. Y. Shapoval ◽

V. T. Petrashov ◽

O. A. Popov ◽

A. O. Westner ◽

M. D. Yoder ◽

...

Keyword(s):

Boron Nitride ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Cubic Boron Nitride ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Boron Nitride Films ◽

Resonance Plasma

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Electron cyclotron resonance plasma assisted sputter deposition of boron nitride films

Applied Physics Letters ◽

10.1063/1.118332 ◽

1997 ◽

Vol 70 (5) ◽

pp. 628-630 ◽

Cited By ~ 8

Author(s):

G. Mohan Rao ◽

S. B. Krupanidhi

Keyword(s):

Boron Nitride ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Sputter Deposition ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Boron Nitride Films ◽

Resonance Plasma

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Growth of cubic boron nitride and boron-carbon-nitrogen coatings using N-trimethylborazine in an electron cyclotron resonance plasma process

Diamond and Related Materials ◽

10.1016/0925-9635(93)90053-5 ◽

1993 ◽

Vol 2 (2-4) ◽

pp. 201-206 ◽

Cited By ~ 62

Author(s):

A. Weber ◽

U. Bringmann ◽

R. Nikulski ◽

C.-P. Klages

Keyword(s):

Boron Nitride ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Cubic Boron Nitride ◽

Electron Cyclotron ◽

Plasma Process ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma ◽

Boron Carbon

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Preparation of turbostratic and cubic boron-nitride films by electron-cyclotron-resonance, plasma-assisted, chemical vapour deposition

Journal of Materials Science Materials in Electronics ◽

10.1007/bf00215567 ◽

1994 ◽

Vol 5 (6) ◽

pp. 324-328 ◽

Cited By ~ 5

Author(s):

T. Goto ◽

T. Tanaka ◽

H. Masumoto ◽

T. Hirai

Keyword(s):

Boron Nitride ◽

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Cubic Boron Nitride ◽

Chemical Vapour ◽

Electron Cyclotron ◽

Boron Nitride Films ◽

Resonance Plasma

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Electron cyclotron resonance plasma deposition of cubic boron nitride using N-trimethylborazine

Surface and Coatings Technology ◽

10.1016/0257-8972(93)90139-f ◽

1993 ◽

Vol 60 (1-3) ◽

pp. 493-497 ◽

Cited By ~ 45

Author(s):

A. Weber ◽

U. Bringmann ◽

R. Nikulski ◽

C.-P. Klages

Keyword(s):

Boron Nitride ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Deposition ◽

Cubic Boron Nitride ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

Applied Physics Letters ◽

10.1063/1.102487 ◽

1990 ◽

Vol 56 (15) ◽

pp. 1424-1426 ◽

Cited By ~ 52

Author(s):

S. J. Pearton ◽

U. K. Chakrabarti ◽

A. P. Kinsella ◽

D. Johnson ◽

C. Constantine

Keyword(s):

Plasma Etching ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Effect of nitrogen flow on the properties of carbon nitride films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Vacuum ◽

10.1016/j.vacuum.2021.110223 ◽

2021 ◽

pp. 110223

Author(s):

Sixu Lin ◽

Dong Xie ◽

Yongliang Tang ◽

Yiwen Wang ◽

Fengjuan Jing ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Carbon Nitride ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Nitrogen Flow ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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X-ray photoelectron diffraction observation of β-SiC(001) obtained by electron cyclotron resonance plasma assisted growth on Si(001)

Applied Surface Science ◽

10.1016/0169-4332(93)90239-8 ◽

1993 ◽

Vol 68 (4) ◽

pp. 575-582 ◽

Cited By ~ 20

Author(s):

M. Diani ◽

J.L. Bischoff ◽

L. Kubler ◽

D. Bolmont

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

X Ray ◽

Photoelectron Diffraction ◽

Resonance Plasma

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Low-temperature deposition of high-quality silicon dioxide films by sputtering-type electron cyclotron resonance plasma

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580664 ◽

1997 ◽

Vol 15 (4) ◽

pp. 1951-1954 ◽

Cited By ~ 20

Author(s):

H. Nakashima ◽

K. Furukawa ◽

Y. C. Liu ◽

D. W. Gao ◽

Y. Kashiwazaki ◽

...

Keyword(s):

Low Temperature ◽

Silicon Dioxide ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

High Quality ◽

Electron Cyclotron Resonance Plasma ◽

Low Temperature Deposition ◽

Temperature Deposition ◽

Resonance Plasma

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Deposition of high‐quality TiN using tetra‐isopropoxide titanium in an electron cyclotron resonance plasma process

Applied Physics Letters ◽

10.1063/1.114847 ◽

1995 ◽

Vol 67 (20) ◽

pp. 2934-2935 ◽

Cited By ~ 19

Author(s):

A. Weber ◽

R. Poeckelmann ◽

C.‐P. Klages

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Plasma Process ◽

High Quality ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Low-damage electron-beam-assisted dry etching of GaAs and AlGaAs using electron cyclotron resonance plasma electron source

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.586892 ◽

1993 ◽

Vol 11 (6) ◽

pp. 2288 ◽

Cited By ~ 4

Author(s):

Heiji Watanabe

Keyword(s):

Electron Beam ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Dry Etching ◽

Plasma Electron ◽

Electron Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Electron Source ◽

Resonance Plasma

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