Beam induced deposition of an ultraviolet transparent silicon oxide film by focused gallium ion beam
2002 ◽
Vol 20
(3)
◽
pp. 828
◽
Keyword(s):
2002 ◽
Vol 41
(Part 2, No. 7A)
◽
pp. L787-L789
◽
Keyword(s):
1993 ◽
Vol 64-65
◽
pp. 849-856
◽
Keyword(s):
1995 ◽
Vol 7
(14)
◽
pp. 2901-2907
◽