Calibration of etching uniformity for large aperture multilevel diffractive optical element by ion beam etching

2000 ◽  
Vol 71 (2) ◽  
pp. 1009-1011 ◽  
Author(s):  
Yongqi Fu ◽  
Ngoi Kok Ann Bryan ◽  
Ong Nan Shing
Keyword(s):  
Ion Beam ◽  
Optical Element ◽  
Diffractive Optical Element ◽  
Ion Beam Etching ◽  
Large Aperture

The Technique of Ion Beam Etching Polishing

2013 ◽  
Vol 395-396 ◽  
pp. 1066-1070
Author(s):  
Cheng Jun Guo ◽  
Ning Pei ◽  
Da Sen Wang ◽  
Feng Ming Nie ◽  
Guang Ping Zhang ◽  
...  
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Optical Element ◽  
Material Surface ◽  
Optical Surface ◽  
Ion Beam Etching ◽  
Original Surface ◽  
Low Viscosity ◽  
Spatial Frequencies ◽  
Layer Thin Film

The accelerated gas ions collide with the surface material, the atom or molecule on material surface is removed by momentum transferring. Depositing a layer low viscosity of the thin film materials on the original surface of the optical, such materials will form a layer thin film on the surface of optical element that is lower than the original. Remove the high-spatial frequencies and obtain super precision optical surface.

Ion beam etching of large aperture diffractive optical elements

2012 ◽  
Vol 20 (8) ◽  
pp. 1676-1683
Author(s):  
邱克强 QIU Ke-qiang ◽  
周小为 ZHOU Xiao-wei ◽  
刘颖 LIU Ying ◽  
徐向东 XU Xiang-dong ◽  
刘正坤 LIU Zheng-kun ◽  
...  
Keyword(s):  
Ion Beam ◽  
Diffractive Optical Elements ◽  
Optical Elements ◽  
Ion Beam Etching ◽  
Large Aperture
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