Electron cyclotron resonance plasma source for ion assisted deposition of thin films

K. Deenamma Vargheese; G. Mohan Rao

doi:10.1063/1.1150225

Electron cyclotron resonance plasma source for ion assisted deposition of thin films

Review of Scientific Instruments ◽

10.1063/1.1150225 ◽

2000 ◽

Vol 71 (2) ◽

pp. 467-472 ◽

Cited By ~ 31

Author(s):

K. Deenamma Vargheese ◽

G. Mohan Rao

Keyword(s):

Thin Films ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Effects of Ion Irradiation on Formation of TiO2 Thin Films by Reactive Sputtering in Electron Cyclotron Resonance Plasma Source.

Shinku ◽

10.3131/jvsj.44.661 ◽

2001 ◽

Vol 44 (7) ◽

pp. 661-666 ◽

Cited By ~ 2

Author(s):

Shinji SUGIHARA ◽

Eiji HONBO ◽

Yushi KATO ◽

Shigeyuki ISHII

Keyword(s):

Thin Films ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ion Irradiation ◽

Reactive Sputtering ◽

Plasma Source ◽

Electron Cyclotron ◽

Tio2 Thin Films ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Synthesis of a-C thin films by plasma-based ion implantation using an electron cyclotron resonance plasma source with a mirror field

Surface and Coatings Technology ◽

10.1016/s0257-8972(03)00036-7 ◽

2003 ◽

Vol 169-170 ◽

pp. 266-269

Author(s):

Toshiya Watanabe ◽

Kazuhiro Yamamoto ◽

Osamu Tsuda ◽

Yoshinori Koga ◽

Akihiro Tanaka

Keyword(s):

Thin Films ◽

Ion Implantation ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Development of Plasma Based Ion Implantation System using an Electron Cyclotron Resonance Plasma Source with a Mirror Field and Synthesis of Carbon Thin Films

Japanese Journal of Applied Physics ◽

10.1143/jjap.40.4684 ◽

2001 ◽

Vol 40 (Part 1, No. 7) ◽

pp. 4684-4690 ◽

Cited By ~ 12

Author(s):

Toshiya Watanabe ◽

Kazuhiro Yamamoto ◽

Yoshinori Koga ◽

Akihiro Tanaka

Keyword(s):

Thin Films ◽

Ion Implantation ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Carbon Thin Films ◽

Resonance Plasma

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Dielectric Permittivity of Amorphous and Hexagonal Electron Cyclotron Resonance Plasma Deposited Ta[sub 2]O[sub 5] Thin Films

Electrochemical and Solid-State Letters ◽

10.1149/1.1390814 ◽

1999 ◽

Vol 2 (6) ◽

pp. 291 ◽

Cited By ~ 11

Author(s):

C. Chaneliere

Keyword(s):

Thin Films ◽

Dielectric Permittivity ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Electron Cyclotron Resonance Plasma Sources and Their Use in Plasma-Assisted Chemical Vapor Deposition of Thin Films

Physics of Thin Films - Plasma Sources for Thin Film Deposition and Etching ◽

10.1016/b978-0-08-092513-4.50007-6 ◽

1994 ◽

pp. 121-233 ◽

Cited By ~ 8

Author(s):

OLEG A. POPOV

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Sources ◽

Resonance Plasma

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Electron cyclotron resonance plasma source for conductive film deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579309 ◽

1994 ◽

Vol 12 (4) ◽

pp. 1281-1286 ◽

Cited By ~ 31

Author(s):

Toshiro Ono ◽

Hiroshi Nishimura ◽

Masaru Shimada ◽

Seitaro Matsuo

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Film Deposition ◽

Electron Cyclotron Resonance Plasma ◽

Conductive Film ◽

Resonance Plasma

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Electrical Characterisation of Gate Dielectrics Deposited with Multipolar Electron Cyclotron Resonance Plasma Source

30th European Solid-State Device Research Conference ◽

10.1109/essderc.2000.194805 ◽

2000 ◽

Author(s):

G.I. Isai ◽

A.Y. Kovalgin ◽

J. Holleman ◽

P.H. Woerlee ◽

H. Wallinga ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Gate Dielectrics ◽

Plasma Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Plasma diagnostics of resonance magnetic field effects on a-Si:H thin films deposition using electron cyclotron resonance plasma

2015 China Semiconductor Technology International Conference ◽

10.1109/cstic.2015.7153464 ◽

2015 ◽

Author(s):

L.C. Hu ◽

Y.W. Lin ◽

C.J. Wang ◽

T. C. Wei ◽

C.R. Yang ◽

...

Keyword(s):

Magnetic Field ◽

Thin Films ◽

Plasma Diagnostics ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Magnetic Field Effects ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma ◽

Resonance Magnetic Field

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Optical Properties of c-Axis Oriented Ba2NaNb5O15 Thin Films Formed by Electron Cyclotron Resonance Plasma Sputtering

Journal of the Ceramic Society of Japan ◽

10.2109/jcersj.105.687 ◽

1997 ◽

Vol 105 (1224) ◽

pp. 687-689

Author(s):

Akira WATAZU ◽

Hiroshi MASUMOTO ◽

Yoichiro MASUDA ◽

Toshio HIRAI

Keyword(s):

Thin Films ◽

Optical Properties ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Sputtering ◽

Resonance Plasma

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Diamond-Like Carbon Film Deposition by Super-Wide Electron-Cyclotron Resonance Plasma Source Excited by Traveling Microwave

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.l802 ◽

1993 ◽

Vol 32 (Part 2, No. 6A) ◽

pp. L802-L805 ◽

Cited By ~ 3

Author(s):

Akira Ishii ◽

Yoshiyuki Sakaguchi ◽

Shoichiro Minomo ◽

Michio Taniguchi ◽

Masato Sugiyo ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Film ◽

Plasma Source ◽

Electron Cyclotron ◽

Film Deposition ◽

Diamond Like Carbon ◽

Electron Cyclotron Resonance Plasma ◽

Diamond Like Carbon Film ◽

Resonance Plasma

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