New applications of arc discharge source

1994 ◽  
Vol 65 (4) ◽  
pp. 1340-1341 ◽  
Author(s):  
M. Chen ◽  
Z. Y. Zou ◽  
J. M. Huang ◽  
B. N. Ye ◽  
W. G. Qian
Keyword(s):  
Arc Discharge ◽  
Discharge Source ◽  
New Applications

Simplified cascaded arc discharge source for production of a processing plasma

1993 ◽  
Vol 64 (4) ◽  
pp. 990-995 ◽  
Author(s):  
Yoshihiro Okuno ◽  
Shinya Yagura ◽  
Hiroshi Ishikura ◽  
Hiroharu Fujita
Keyword(s):  
Arc Discharge ◽  
Discharge Source

Linear arc discharge source for large area plasma processing

1997 ◽  
Vol 70 (5) ◽  
pp. 577-579 ◽  
Author(s):  
L. Bárdoš ◽  
H. Baránková ◽  
S. Berg
Keyword(s):  
Arc Discharge ◽  
Plasma Processing ◽  
Large Area ◽  
Discharge Source

VUV wall stabilized argon arc discharge source

1991 ◽  
Author(s):  
Futian Li ◽  
Jianlin Cao ◽  
Bo Chen ◽  
Limin Qian ◽  
Lei Jin ◽  
...  
Keyword(s):  
Arc Discharge ◽  
Discharge Source

Development of a cascade arc discharge source for an atmosphere-vacuum interface device

2016 ◽  
Vol 87 (8) ◽  
pp. 083503 ◽  
Author(s):  
S. Namba ◽  
T. Endo ◽  
S. Fujino ◽  
C. Suzuki ◽  
N. Tamura
Keyword(s):  
Arc Discharge ◽  
Cascade Arc ◽  
Discharge Source ◽  
Vacuum Interface ◽  
Interface Device
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